Comparison of optical and chemical properties of thermally evaporated and spin-coated chalcogenide As-S thin films targeting electron beam lithography applications
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216275%3A25310%2F19%3A39914855" target="_blank" >RIV/00216275:25310/19:39914855 - isvavai.cz</a>
Result on the web
<a href="https://www.sciencedirect.com/science/article/pii/S0022309319300109?via%3Dihub" target="_blank" >https://www.sciencedirect.com/science/article/pii/S0022309319300109?via%3Dihub</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1016/j.jnoncrysol.2018.12.012" target="_blank" >10.1016/j.jnoncrysol.2018.12.012</a>
Alternative languages
Result language
angličtina
Original language name
Comparison of optical and chemical properties of thermally evaporated and spin-coated chalcogenide As-S thin films targeting electron beam lithography applications
Original language description
Presented work compares optical and chemical properties of As30S70, As35S65 and As40S60 amorphous chalcogenide thin films deposited by thermal evaporation and by spin-coating. Structural and compositional differences given by the chosen deposition technique and post deposition treatment were revealed by Raman spectroscopy and EDS. Applicability of studied thin films in electron beam lithography was investigated using both monoamine and diamine based developers. Thermally evaporated thin films exhibited negative etching contrary to the spin-coated films which showed positive etching. Studied thin films proved to be suitable positive and negative photoresists for both grey-scale and step-like lithography.
Czech name
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Czech description
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Classification
Type
J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database
CEP classification
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OECD FORD branch
20506 - Coating and films
Result continuities
Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)
Others
Publication year
2019
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Journal of Non-Crystalline Solids
ISSN
0022-3093
e-ISSN
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Volume of the periodical
508
Issue of the periodical within the volume
March
Country of publishing house
NL - THE KINGDOM OF THE NETHERLANDS
Number of pages
8
Pages from-to
7-14
UT code for WoS article
000459357800002
EID of the result in the Scopus database
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