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Comparison of optical and chemical properties of thermally evaporated and spin-coated chalcogenide As-S thin films targeting electron beam lithography applications

The result's identifiers

  • Result code in IS VaVaI

    <a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216275%3A25310%2F19%3A39914855" target="_blank" >RIV/00216275:25310/19:39914855 - isvavai.cz</a>

  • Result on the web

    <a href="https://www.sciencedirect.com/science/article/pii/S0022309319300109?via%3Dihub" target="_blank" >https://www.sciencedirect.com/science/article/pii/S0022309319300109?via%3Dihub</a>

  • DOI - Digital Object Identifier

    <a href="http://dx.doi.org/10.1016/j.jnoncrysol.2018.12.012" target="_blank" >10.1016/j.jnoncrysol.2018.12.012</a>

Alternative languages

  • Result language

    angličtina

  • Original language name

    Comparison of optical and chemical properties of thermally evaporated and spin-coated chalcogenide As-S thin films targeting electron beam lithography applications

  • Original language description

    Presented work compares optical and chemical properties of As30S70, As35S65 and As40S60 amorphous chalcogenide thin films deposited by thermal evaporation and by spin-coating. Structural and compositional differences given by the chosen deposition technique and post deposition treatment were revealed by Raman spectroscopy and EDS. Applicability of studied thin films in electron beam lithography was investigated using both monoamine and diamine based developers. Thermally evaporated thin films exhibited negative etching contrary to the spin-coated films which showed positive etching. Studied thin films proved to be suitable positive and negative photoresists for both grey-scale and step-like lithography.

  • Czech name

  • Czech description

Classification

  • Type

    J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database

  • CEP classification

  • OECD FORD branch

    20506 - Coating and films

Result continuities

  • Project

    Result was created during the realization of more than one project. More information in the Projects tab.

  • Continuities

    P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Others

  • Publication year

    2019

  • Confidentiality

    S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Data specific for result type

  • Name of the periodical

    Journal of Non-Crystalline Solids

  • ISSN

    0022-3093

  • e-ISSN

  • Volume of the periodical

    508

  • Issue of the periodical within the volume

    March

  • Country of publishing house

    NL - THE KINGDOM OF THE NETHERLANDS

  • Number of pages

    8

  • Pages from-to

    7-14

  • UT code for WoS article

    000459357800002

  • EID of the result in the Scopus database