Characterization of thin films non-uniform in optical parameters by spectroscopic digital reflectometry

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216305%3A26210%2F03%3APU40933" target="_blank" >RIV/00216305:26210/03:PU40933 - isvavai.cz</a>

Result on the web

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DOI - Digital Object Identifier

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Result language

angličtina

Original language name

Characterization of thin films non-uniform in optical parameters by spectroscopic digital reflectometry

Original language description

For applying this method the special experimental arrangement containing CCD camera as a detector is used. The spectral dependences of the local reflectances are obtained. After treating these experimental data the distributions of the values of the local thicknesses and local refractive index along a large area of the substrates of the nonuniform films are found.

Czech name

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Czech description

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Type

D - Article in proceedings

CEP classification

BH - Optics, masers and lasers

OECD FORD branch

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Project

Result was created during the realization of more than one project. More information in the Projects tab.

Continuities

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year

2003

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Article name in the collection

Proceedings of SPIE

ISBN

0-8194-5055-3

ISSN

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e-ISSN

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Number of pages

12

Pages from-to

260-271

Publisher name

SPIE-The International Society for Optical Engineering

Place of publication

Bellingham, Washington, USA

Event location

San Diego, California USA

Event date

Aug 3, 2003

Type of event by nationality

WRD - Celosvětová akce

UT code for WoS article

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