NOISE AND STEP HEIGHT PERFORMANCE OF SELECTED OPTICAL SURFACE MEASURING INSTRUMENTS
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216305%3A26210%2F17%3APU125997" target="_blank" >RIV/00216305:26210/17:PU125997 - isvavai.cz</a>
Result on the web
<a href="http://doi.org./10.17973/MMSJ.2017_12_201727" target="_blank" >http://doi.org./10.17973/MMSJ.2017_12_201727</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.17973/MMSJ.2017_12_201781" target="_blank" >10.17973/MMSJ.2017_12_201781</a>
Alternative languages
Result language
angličtina
Original language name
NOISE AND STEP HEIGHT PERFORMANCE OF SELECTED OPTICAL SURFACE MEASURING INSTRUMENTS
Original language description
Increasing demands for manufacturing quality and new standards in surface metrology foreshadow a widespread adoption of 3D surface topography measurement in manufacturing quality control. This raises the question of instrument selection. Coherence scanning interferometry and laser scanning confocal microscopy are some of the most common technologies in optical measurement of surface topography. These methods differ significantly in their suitability for different types of measurement. This article provides a comparison of the measurement noise and step height measurement performance two measuring instruments based on these two principles in relation to objectives used for measurement. Such data can be used to inform instrument selection in an industrial environment.
Czech name
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Czech description
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Classification
Type
J<sub>SC</sub> - Article in a specialist periodical, which is included in the SCOPUS database
CEP classification
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OECD FORD branch
20306 - Audio engineering, reliability analysis
Result continuities
Project
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Continuities
S - Specificky vyzkum na vysokych skolach
Others
Publication year
2017
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
MM Science Journal
ISSN
1803-1269
e-ISSN
1805-0476
Volume of the periodical
2017
Issue of the periodical within the volume
5
Country of publishing house
CZ - CZECH REPUBLIC
Number of pages
5
Pages from-to
2030-2034
UT code for WoS article
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EID of the result in the Scopus database
2-s2.0-85038125046