Characterization of randomly rough surfaces using angle-resolved scattering of light and atomic force microscopy

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216305%3A26210%2F21%3APU142115" target="_blank" >RIV/00216305:26210/21:PU142115 - isvavai.cz</a>

Alternative codes found

RIV/00216224:14310/21:00118706

Result on the web

<a href="https://iopscience.iop.org/article/10.1088/2040-8986/ac1f35" target="_blank" >https://iopscience.iop.org/article/10.1088/2040-8986/ac1f35</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1088/2040-8986/ac1f35" target="_blank" >10.1088/2040-8986/ac1f35</a>

Result language

angličtina

Original language name

Characterization of randomly rough surfaces using angle-resolved scattering of light and atomic force microscopy

Original language description

The roughness of four samples of silicon single-crystal surfaces roughened by anodic oxidation is studied using atomic force microscopy (AFM) and angle-resolved scattering of light. The power spectral density functions (PSDFs) are determined on the basis of the measured values of the intensity of the scattered light. This is done on the basis of three models, which establish relation between the intensity of the light scattered in the given direction and the values of the PSDF at a certain spatial frequency. Two of the models are based on the scalar diffraction theory (SDT), while the third is based on the Rayleigh-Rice perturbation theory. The formulae corresponding to the SDT are derived in the theoretical part of the paper. The condition for the Fraunhofer diffraction is not satisfied if the values of the wavelength, distance to the detector and the dimensions of the illuminated spot on the sample used in the experiment are considered. However, it is shown that if the calculation of the intensity of the scattered light is performed in a certain way, then the validity of the expansion only up to the linear terms in the phase terms, i.e. in the same way as in the Fraunhofer diffraction, is not limited by the dimensions of the light spot but by the autocorrelation length of the randomly rough surface. The results obtained by the optical methods are compared with those obtained by AFM. It is shown that there is a good agreement between these results.

Czech name

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Czech description

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Type

J_imp - Article in a specialist periodical, which is included in the Web of Science database

CEP classification

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OECD FORD branch

10306 - Optics (including laser optics and quantum optics)

Project

Result was created during the realization of more than one project. More information in the Projects tab.

Continuities

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year

2021

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical

Journal of Optics

ISSN

2040-8978

e-ISSN

2040-8986

Volume of the periodical

23

Issue of the periodical within the volume

10

Country of publishing house

GB - UNITED KINGDOM

Number of pages

14

Pages from-to

„ 105602“-„ 105602“

UT code for WoS article

000698822800001

EID of the result in the Scopus database

2-s2.0-85116895212