Microhotplate sensor arrays based on sputtered and screen-printed metal oxide films for selective detection of volatile compounds

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216305%3A26220%2F03%3APU38835" target="_blank" >RIV/00216305:26220/03:PU38835 - isvavai.cz</a>

Result on the web

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DOI - Digital Object Identifier

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Result language

angličtina

Original language name

Microhotplate sensor arrays based on sputtered and screen-printed metal oxide films for selective detection of volatile compounds

Original language description

The aim of this work is the development of micromachined metal oxide sensor arrays for environmental applications such as the selective detection of ammonia in the atmosphere. Sensitivity and selectivity studies to ammonia, benzene and ethanol vapours and their binary mixtures was investigated on pure tin and tungsten oxide micromachined gas sensors. It has been found that an excellent identification of the species is possible using a single sensor. Using an adapted screen-printing techniquue, sensitivelayers of nanopowder tin dioxide and tungsten trioxide were deposited on silicon micromachined substrates. The morphology and composition of deposited films were investigated by SEM, XRD and EDX.

Czech name

Microhotplate sensor arrays based on sputtered and screen-printed metal oxide films for selective detection of volatile compounds

Czech description

The aim of this work is the development of micromachined metal oxide sensor arrays for environmental applications such as the selective detection of ammonia in the atmosphere. Sensitivity and selectivity studies to ammonia, benzene and ethanol vapours and their binary mixtures was investigated on pure tin and tungsten oxide micromachined gas sensors. It has been found that an excellent identification of the species is possible using a single sensor. Using an adapted screen-printing techniquue, sensitivelayers of nanopowder tin dioxide and tungsten trioxide were deposited on silicon micromachined substrates. The morphology and composition of deposited films were investigated by SEM, XRD and EDX.

Type

D - Article in proceedings

CEP classification

JB - Sensors, detecting elements, measurement and regulation

OECD FORD branch

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Project

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Continuities

Z - Vyzkumny zamer (s odkazem do CEZ)

Publication year

2003

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Article name in the collection

Book of tutorials and posters - Smart Sensors and MEMS, NATO Advanced Study Institute

ISBN

0-9733840-0

ISSN

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e-ISSN

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Number of pages

1

Pages from-to

291-291

Publisher name

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Place of publication

Povoa de Varzim, Portugalsko

Event location

Povoa de Varzim

Event date

Jan 1, 2003

Type of event by nationality

WRD - Celosvětová akce

UT code for WoS article

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