Carbon nanotubes in pressure sensors

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216305%3A26220%2F07%3APU70457" target="_blank" >RIV/00216305:26220/07:PU70457 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Result language
angličtina
Original language name
Carbon nanotubes in pressure sensors
Original language description
In this paper a new research and development of the pressure sensors utilizing carbon nanotubes (CNTs) arrays as the electron source in emission sensor or as the surface increase element in capacitance sensor are presented. Both sensors consisted of thetwo parts; elastic electrode-sensing film fabricated by wet anisotropic etching process and solid electrode. The emission sensor has elastic anode electrode with membrane and multi-wall carbon nanotubes (MWCNTs) arrays cathode in the vacuum chamber. Thecapacitance sensor has the same topology extensive by CNT on both electrodes without vacuum chamber. The MWCNTs were grown by plasma enhanced chemical vapour deposition (PECVD).
Czech name
Uhlíkové nanotrubice v tlakových senzorech
Czech description
V tomto článku budeme popisovat výzkum a vývoj tlakových senzorů využívající uhlíkové nanotrubice.

Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>Z - Vyzkumny zamer (s odkazem do CEZ)

Publication year
2007
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Article name in the collection
EDS 07 IMAPS CS INTERNATIONAL CONFERENCE PROCEEDING
ISBN
978-80-214-3470-7
ISSN
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e-ISSN
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Number of pages
5
Pages from-to
178-182
Publisher name
Ing. Zdeněk Novotný CSc., Brno, Ondráčkova 105
Place of publication
Brno
Event location
BRNO
Event date
Sep 20, 2007
Type of event by nationality
WRD - Celosvětová akce
UT code for WoS article
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