A novel hybrid integrated system for capacitive pressure MEMS sensors

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216305%3A26220%2F09%3APU83621" target="_blank" >RIV/00216305:26220/09:PU83621 - isvavai.cz</a>

Result on the web

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DOI - Digital Object Identifier

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Result language

angličtina

Original language name

A novel hybrid integrated system for capacitive pressure MEMS sensors

Original language description

The paper deals with a novel hybrid integrated system for capacitive pressure MEMS sensors. This system should be splitted into the two parts. One is novel integrated capacity-to-current converter (C/I) and the second is auxiliary part made from standardSMD devices. The C/I converter was designed in CMOS process with technology AMIS 0,7 um. The second part consists of the sigma-delta converter, microcontroller, communication and data bus. The designed system profits from the previous works, where the capacity-to-digital output converter AD 7745 is the main part of the processing stage. This converter is substituted by the novel C/I converter. The C/I converter with digital calibration handled in microcontroller provide almost the same accuracy and linearity as the mentioned AD 7745 converter, but with less complexity of the whole circuitries.

Czech name

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Czech description

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Type

J_x - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)

CEP classification

JA - Electronics and optoelectronics

OECD FORD branch

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Project

Result was created during the realization of more than one project. More information in the Projects tab.

Continuities

Z - Vyzkumny zamer (s odkazem do CEZ)

Publication year

2009

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical

ElectroScope - http://www.electroscope.zcu.cz

ISSN

1802-4564

e-ISSN

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Volume of the periodical

2009

Issue of the periodical within the volume

3

Country of publishing house

CZ - CZECH REPUBLIC

Number of pages

4

Pages from-to

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UT code for WoS article

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EID of the result in the Scopus database

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