Electrolytic bath for anodic and cathodic processing of metal and oxide layers on dielectric, semiconducting and metallic substrates

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216305%3A26220%2F12%3APR26515" target="_blank" >RIV/00216305:26220/12:PR26515 - isvavai.cz</a>
Result on the web
<a href="http://www.umel.feec.vutbr.cz/LabSensNano/Products.aspx" target="_blank" >http://www.umel.feec.vutbr.cz/LabSensNano/Products.aspx</a>
DOI - Digital Object Identifier
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Result language
angličtina
Original language name
Electrolytic bath for anodic and cathodic processing of metal and oxide layers on dielectric, semiconducting and metallic substrates
Original language description
The device is designed as a cylindrical type electrolytic cell (bath) made of polytetrafluoroethylene (PTFE) consisting of two major components: the upper part to be filled with a liquid electrolyte and the bottom part for holding sample to be processed. The samples are pieces of silicon wafers with metal or oxide layers on top. For being processed, the samples are individually introduced in the device, were they are pressed from the face sides by a PTFE ring of the upper cell part, so that a circular area of the face side of the sample, 3-20 mm in diameter, is in contact with anodizing solution while the back wafer side is fully isolated from the treatment. AutoCAD-made drawings of cell's parts and assembly drawings of the whole device are available.
Czech name
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Czech description
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Publication year
2012
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Internal product ID
teflon cell
Numerical identification
96887
Technical parameters
The area available for processing - 3...20 mm; sample size - 1x1...3x3 cm; electrolyte volume - up to 200 ml; counter electrode - changeable (Al, Pt, Au, etc); assembly/desembly - by screwing motions; working temperature - 0...70 deg cent.; available current densities - 0...2 A; voltage - 0...1200 V; stirring - possible on demand; isolation - yes on demand; Funkční vzorek byl na základě získaných poznatků zkonstruován a ověřen. Je využíván na pracovišti řešitele LabSensNano (VUT v Brně, Fakulta elektrotechniky a komunikačních technologií, Ústav mikroelektroniky, Technická 3058/10, 616 00 Brno, Česká republika)
Economical parameters
10 000 Kč vývoj cely
Application category by cost
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Owner IČO
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Owner name
Ústav mikroelektroniky
Owner country
CZ - CZECH REPUBLIC
Usage type
N - Využití výsledku jiným subjektem je možné bez nabytí licence (výsledek není licencován)
Licence fee requirement
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Web page
http://www.umel.feec.vutbr.cz/LabSensNano/Products.aspx

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