Aerosol assisted chemical vapour deposition of surface-modified tungsten oxide nanostructures: processing and application

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216305%3A26220%2F14%3APU111478" target="_blank" >RIV/00216305:26220/14:PU111478 - isvavai.cz</a>

Result on the web

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DOI - Digital Object Identifier

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Result language

angličtina

Original language name

Aerosol assisted chemical vapour deposition of surface-modified tungsten oxide nanostructures: processing and application

Original language description

In this work, we used AACVD to synthesize non-modified and modified tungsten oxide NSs, demonstrating that synthesis, functionalization and integration of these structures into microsystem can take place in a single processing step. These NSs were integrated in a single-step deposition via vapour solid mechanism, without the use of pre-grown catalysts, with either MEMS- or polymer-based devices, showing the compatibility of AACVD with microelectronics manufacturing processes. The microsensors fabricatedusing this method were validated towards various gaseous species, including hydrogen, ethanol and carbon monoxide, showing satisfactory responses. The sensors based on modified tungsten oxide NSs revealed enhanced properties compared to intrinsic tungsten oxide NSs, particularly platinum NPs modified tungsten oxide show better performance to hydrogen. In addition, tungsten oxide NSs, grown on polymeric- and MEMS-based sensor platforms, revealed comparable sensor behavior, with similar r

Czech name

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Czech description

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Type

O - Miscellaneous

CEP classification

BM - Solid-state physics and magnetism

OECD FORD branch

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Project

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Continuities

V - Vyzkumna aktivita podporovana z jinych verejnych zdroju

Publication year

2014

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů