Temperature and Sensitivity Analysis on MEMS Vibration Sensors with Different Principles of Operation

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216305%3A26220%2F15%3APU115099" target="_blank" >RIV/00216305:26220/15:PU115099 - isvavai.cz</a>
Result on the web
<a href="http://icsv22.org/" target="_blank" >http://icsv22.org/</a>
DOI - Digital Object Identifier
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Result language
angličtina
Original language name
Temperature and Sensitivity Analysis on MEMS Vibration Sensors with Different Principles of Operation
Original language description
This article describes the experimental research on qualitative parameter validation of MEMS-based vibration sensors. The aim of the paper is to compare three MEMS vibration sensors with different principles of operation; the investigated samples represent major principles used in currently available MEMS accelerometers, namely the capacitive (STMicroelectronics LIS3L06AL), thermal (MEMSIC MXA6500M), and piezoresistive (Panasonic AGS61331) approaches. The actual comparison of the examined objects was performed using primary and secondary methods for the calibration of vibration sensors. In the first experiment, we measured the sensitivity and frequency characteristics within the operating range of the accelerometers, applying the primary methods to compare the investigated MEMS objects. At the following stage, the results yielded from the monitoring of temperature effects and their analysis based on the secondary calibration methods were utilized to verify the sensitivity and temperature dependences of the MEMS accelerometers. Within the paper, the measured characteristics are compared to the related catalog datasheets, and the possibilities of suppressing the temperature effects are discussed to finalize the overall presentation of the problem.
Czech name
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Czech description
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Project
<a href="/en/project/LO1210" target="_blank" >LO1210: Energy for Sustainable Development</a><br>
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year
2015
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Article name in the collection
Proceedings of the 22nd International Congress on Sound and Vibration
ISBN
978-88-88942-48-3
ISSN
2329-3675
e-ISSN
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Number of pages
8
Pages from-to
1-8
Publisher name
International Institute of Acoustic and Vibration
Place of publication
Florencie, Itálie
Event location
Florencie
Event date
Jul 12, 2015
Type of event by nationality
WRD - Celosvětová akce
UT code for WoS article
000398997006083

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