Optical pressure sensors in LTCC technology
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216305%3A26220%2F15%3APU116599" target="_blank" >RIV/00216305:26220/15:PU116599 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Alternative languages
Result language
angličtina
Original language name
Optical pressure sensors in LTCC technology
Original language description
This paper deals with the design and measurement of optical pressure sensors developed in LTCC technology. The sensor design was made for two working principles used in optical sensing. Using interferometry measurement of the distance using Fabry-Pérot resonator and diffraction structure of Fiber Bragg Grating. In both cases there was used ceramic structure with membrane used as a pressure transducer. In the first test both methods seems to be useable in pressure sensing of pressures close to the atmospheric pressure. There are still some manufacturing and design challenges, which are needed to overcome.
Czech name
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Czech description
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Classification
Type
O - Miscellaneous
CEP classification
JA - Electronics and optoelectronics
OECD FORD branch
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Result continuities
Project
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Continuities
S - Specificky vyzkum na vysokych skolach
Others
Publication year
2015
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů