A chip based on microelectrode arrays for the fabrication of single nanowire system via dielectrophoresis effect

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216305%3A26220%2F16%3APU121283" target="_blank" >RIV/00216305:26220/16:PU121283 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Result language
angličtina
Original language name
A chip based on microelectrode arrays for the fabrication of single nanowire system via dielectrophoresis effect
Original language description
We develop a chip based on microelectrode arrays to be used in the fabrication of single nanowire (NW) systems for gas detection. The proposed topology of test electrode system was designed to understand the different factor involved in the dielectrophoresis (DEP) process and determine the optimal conditions for a facile integration and alignment of semiconducting metal oxide NWs produced via aerosol-assisted chemical vapor deposition (AACVD). Various electrode geometries with electrode gaps between 2 and 10 µm and electrode tip-end shapes are investigated. Results obtained from SEM, optical microscopy and electrical measurement demonstrate the integration and alignment of single NW across the electrodes only for the electrodes with gaps below 3 µm. These results are discussed and further improvements in the design of these systems are suggested.
Czech name
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Czech description
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Publication year
2016
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Article name in the collection
IMAPS Flash Conference 2nd International Microelectronics Assembly and Packaging Society Flash Conference
ISBN
978-80-214-5416-3
ISSN
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e-ISSN
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Number of pages
5
Pages from-to
1-5
Publisher name
IMAPS
Place of publication
Brno
Event location
Brno
Event date
Nov 3, 2016
Type of event by nationality
EUR - Evropská akce
UT code for WoS article
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