Optical pressure sensors for harsh environment
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216305%3A26220%2F18%3APU130207" target="_blank" >RIV/00216305:26220/18:PU130207 - isvavai.cz</a>
Result on the web
<a href="https://ieeexplore.ieee.org/document/8346868" target="_blank" >https://ieeexplore.ieee.org/document/8346868</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.23919/EMPC.2017.8346868" target="_blank" >10.23919/EMPC.2017.8346868</a>
Alternative languages
Result language
angličtina
Original language name
Optical pressure sensors for harsh environment
Original language description
This paper deals with the design, manufacturing, and evaluation of a new optical pressure sensor produced by using Low Temperature Co-fired Ceramic technology. This optical sensor is designed for the applications with harsh operating conditions. The sensor has to withstand temperatures up to 300 °C and work in chemically aggressive environment. The paper gives a brief overview of the benefits and problems related to the optical measurement methods suitable for pressure sensor interrogation. Optical spectrum change based measurement method was chosen for the best sensor performance. Pressure transducer presented in this paper is based on the interrogation of the light spectra reflected from the Fabry-Pérot optical cavity. The sensors were designed for various pressure ranges, samples were manufactured, measured and tested. A selected optical method for enhancing the temperature compensation and measurement accuracy is discussed.
Czech name
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Czech description
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Classification
Type
D - Article in proceedings
CEP classification
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OECD FORD branch
20504 - Ceramics
Result continuities
Project
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Continuities
S - Specificky vyzkum na vysokych skolach
Others
Publication year
2018
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Article name in the collection
Microelectronics and Packaging Conference (EMPC) & Exhibition, 2017 21st European
ISBN
978-0-9568086-4-6
ISSN
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e-ISSN
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Number of pages
5
Pages from-to
1-5
Publisher name
Neuveden
Place of publication
Neuveden
Event location
Warsaw, Polsko
Event date
Sep 10, 2017
Type of event by nationality
WRD - Celosvětová akce
UT code for WoS article
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