Mechanical properties of pulsed-plasma polymerized vinyltriethoxysilane

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216305%3A26310%2F03%3APU38788" target="_blank" >RIV/00216305:26310/03:PU38788 - isvavai.cz</a>

Result on the web

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DOI - Digital Object Identifier

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Result language

angličtina

Original language name

Mechanical properties of pulsed-plasma polymerized vinyltriethoxysilane

Original language description

Plasma-polymerized thin films of vinyltriethoxysilane have been prepared by plasma-enhanced chemical vapor deposition using an RF (13.56 MHz) helical coupling pulsed-plasma system. Thin films of the thickness ranging from 80 nm to 1.5 um were subjected to nanoindentation measurements. The Young's modulus determined from the indentation load-displacement curve has increased with the effective power used from 4 GPa to 11 GPa. Thin films have exhibited an abrupt increase of the hardness at the film surfacee.

Czech name

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Czech description

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Type

D - Article in proceedings

CEP classification

BL - Plasma physics and discharge through gases

OECD FORD branch

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Project

Result was created during the realization of more than one project. More information in the Projects tab.

Continuities

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year

2003

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Article name in the collection

16th International Symposium on Plasma Chemistry

ISBN

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ISSN

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e-ISSN

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Number of pages

6

Pages from-to

461-466

Publisher name

Department of chemistry, University of Bari

Place of publication

Bari

Event location

Taormina

Event date

Jun 21, 2003

Type of event by nationality

WRD - Celosvětová akce

UT code for WoS article

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