Characterization of pp-TVS films by spectroscopic ellipsometry

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216305%3A26310%2F06%3APU63331" target="_blank" >RIV/00216305:26310/06:PU63331 - isvavai.cz</a>

Result on the web

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DOI - Digital Object Identifier

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Result language

angličtina

Original language name

Characterization of pp-TVS films by spectroscopic ellipsometry

Original language description

We have focused on characterization of plasma polymer films using spectroscopic ellipsometry in this work. The determination of dispersion curves of the refractive index and extinction coefficient for films deposited at different process parameters has been the primary aim of our study.

Czech name

Charakterizace pp-TVS vrstev pomocí spektroskopické elipsometrie

Czech description

Byly stanoveny disperzní křivky indexu lomu a extinkčního koeficientu pro pp-TVS vrstvy proměřené spektroskopickou elipsometrií.

Type

A - Audiovisual production

CEP classification

BM - Solid-state physics and magnetism

OECD FORD branch

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Project

Result was created during the realization of more than one project. More information in the Projects tab.

Continuities

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year

2006

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

ISBN

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Place of publication

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