Optical constants of plasma-polymerized tetravinylsilane films
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216305%3A26310%2F07%3APU70639" target="_blank" >RIV/00216305:26310/07:PU70639 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Alternative languages
Result language
angličtina
Original language name
Optical constants of plasma-polymerized tetravinylsilane films
Original language description
We have focused on the optical properties of thin plasma-polymerized films deposited from a mixture of tetravinylsilane and oxygen gas and evaluated by means of spectroscopic ellipsometry. The RF effective power of pulsed plasma and the oxygen/total flowrate ratio were varied in broad range. We found a clear link between the RF effective power used and optical properties (refractive index, extinction coefficient, band gap) of the films.
Czech name
Optické parametry plazmového polymeru připraveného z tetravinylsilanu
Czech description
Optické parametry plazmového polymeru připraveného z tetravinylsilanu
Classification
Type
D - Article in proceedings
CEP classification
CF - Physical chemistry and theoretical chemistry
OECD FORD branch
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Result continuities
Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>Z - Vyzkumny zamer (s odkazem do CEZ)
Others
Publication year
2007
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Article name in the collection
18th International Symposium on Plasma Chemistry
ISBN
978-4-9903773-2-8
ISSN
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e-ISSN
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Number of pages
4
Pages from-to
1-4
Publisher name
Neuveden
Place of publication
Neuveden
Event location
Kjoto
Event date
Aug 26, 2007
Type of event by nationality
WRD - Celosvětová akce
UT code for WoS article
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