Characteristics of SiOx-containing hard film prepared by low temperature plasma enhanced chemical vapor deposition using hexamethyldisilazane or vinyltrimethylsilane and post oxygen plasma treatment
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216305%3A26310%2F17%3APU126305" target="_blank" >RIV/00216305:26310/17:PU126305 - isvavai.cz</a>
Result on the web
<a href="http://dx.doi.org/10.1016/j.matchemphys.2016.12.057" target="_blank" >http://dx.doi.org/10.1016/j.matchemphys.2016.12.057</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1016/j.matchemphys.2016.12.057" target="_blank" >10.1016/j.matchemphys.2016.12.057</a>
Alternative languages
Result language
angličtina
Original language name
Characteristics of SiOx-containing hard film prepared by low temperature plasma enhanced chemical vapor deposition using hexamethyldisilazane or vinyltrimethylsilane and post oxygen plasma treatment
Original language description
This study, monomers of hexamethyldisilazane (HMDSZ) and vinyltrimethylsilane (VTMS) were respectively used to deposit on the surface of polyethylene terephthalate (PET) substrate by plasma enhanced chemical vapor deposition. Oxygen plasma treatment follows the HMDSZ and VTMS deposition to produce a hydrophilic surface film on the deposited surface. Time for HMDSZ and VTMS plasma deposition was changed to investigate its influences on water contact angle, deposited film thickness, refractive index, and friction coefficient properties. The surface morphologies of the processed samples were observed by scanning electron microscope and their chemical compositions were measured by X-ray photoelectron spectroscopy. At 550 nm wavelength, the optical transmittance of PET after the HMDSZ treatment decreases from 89% to 83%, but increases from 89% to 95% for the VTMS treatment. With increase in HMDSZ and VTMS deposition times, the film thickness increases and the refractive index decreases. Result revealed by XPS, SiO2 film is formed on the sample surface after the O2 plasma treatment. The film adhesion capability by the HMDSZ+O2 and VTMS+O2 treatment was stronger than that by the HMDSZ and VTMS treatment only. The SiOx films produced by HMDSZ+O2 and VTMS+O2 treatment can increase the film hardness and improve light transmittance.
Czech name
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Czech description
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Classification
Type
J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database
CEP classification
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OECD FORD branch
10403 - Physical chemistry
Result continuities
Project
<a href="/en/project/GA16-09161S" target="_blank" >GA16-09161S: Synthesis of multifunctional plasma polymers for polymer composites without interfaces</a><br>
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)
Others
Publication year
2017
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
MATERIALS CHEMISTRY AND PHYSICS
ISSN
0254-0584
e-ISSN
1879-3312
Volume of the periodical
189
Issue of the periodical within the volume
1 March 2017
Country of publishing house
CH - SWITZERLAND
Number of pages
8
Pages from-to
183-190
UT code for WoS article
000393723800027
EID of the result in the Scopus database
2-s2.0-85010917632