Tin Dioxide ? Multiwalled Carbon Nanotubes Based Gas Sensor for Isobutane Detection

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216305%3A26620%2F14%3APU113946" target="_blank" >RIV/00216305:26620/14:PU113946 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Result language
angličtina
Original language name
Tin Dioxide ? Multiwalled Carbon Nanotubes Based Gas Sensor for Isobutane Detection
Original language description
The aim of this work is design, fabrication and characterization of semiconductive gas sensor with active layer based on tin dioxide and multiwalled carbon nanotubes for isobutene detection. Combination of LTCC technology and thick-film technology was chosen for sensor fabrication due to the need of high operating temperature. These technologies allow the sensor to be heated up to 500 °C. Gold/titanium interdigitated electrodes on silicon substrate were chosen to achieve higher sensitivity. Titanium layer has high temperature resistance and provides very good adhesion to silicon substrate and top gold layer that improves conductivity of these finger electrodes. Several important parameters of active layer influencing sensor properties were investigated. Influence of suitable volume of multiwalled carbon nanotubes in tin dioxide active layer, active layer thickness and operating temperature to sensing properties were studied. It was found that the active layer with the largest amount of
Czech name
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Czech description
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Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year
2014
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

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