Atomic layer deposition of titanium dioxide on multi-walled carbon nanotubes for ammonia gas sensing

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216305%3A26620%2F19%3APU134866" target="_blank" >RIV/00216305:26620/19:PU134866 - isvavai.cz</a>

Alternative codes found

RIV/00216224:14310/19:00109858

Result on the web

<a href="https://www.sciencedirect.com/science/article/pii/S0257897219303962?via%3Dihub" target="_blank" >https://www.sciencedirect.com/science/article/pii/S0257897219303962?via%3Dihub</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1016/j.surfcoat.2019.04.031" target="_blank" >10.1016/j.surfcoat.2019.04.031</a>

Result language

angličtina

Original language name

Atomic layer deposition of titanium dioxide on multi-walled carbon nanotubes for ammonia gas sensing

Original language description

Carbon nanotube (CNTs)-metal oxide semiconductor (MOS) hybrid nanostructures can provide a new pathway for room temperature chemiresistive gas sensors due to combined properties of both the materials and the creation of heterojunctions between CNTs and MOS. Multi-walled carbon nanotubes (MWCNTs) were grown on Si substrates coated with SiO2 layer by catalytic chemical vapor deposition (CCVD) and coated by TiO2 films of different nominal thicknesses, 5, 10 and 20 nm, using atomic layer deposition (ALD). ALD is a self-limiting surface process providing highly uniform and conformal coatings if reactive sites exist on the surface. The CNT surface is quite inert and therefore, a modification of MWCNTs by carboxyl plasma polymer (PP) film was applied prior to ALD of TiO2. The carboxyl PPs improved film uniformity, even though the thinnest TiO2 film still formed an island-like structure. Raman spectroscopy revealed that coating by TiO2 or carboxyl PP increased structural disorder of sp(2) carbon in the MWCNTs and the thinnest TiO2 coatings induced the lowest disorder. The thinnest coatings also resulted in the highest sensor response to NH3. Nevertheless, for all thicknesses the sensors coated with carboxyl PP/TiO2 double layer showed higher response as compared to the pristine CNTs and those without the carboxyl PP film.

Czech name

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Czech description

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Type

J_imp - Article in a specialist periodical, which is included in the Web of Science database

CEP classification

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OECD FORD branch

20501 - Materials engineering

Project

Result was created during the realization of more than one project. More information in the Projects tab.

Continuities

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year

2019

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical

Surface and Coatings Technology

ISSN

0257-8972

e-ISSN

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Volume of the periodical

370

Issue of the periodical within the volume

370

Country of publishing house

CH - SWITZERLAND

Number of pages

9

Pages from-to

235-243

UT code for WoS article

000471083100024

EID of the result in the Scopus database

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