A SiN Microcalorimeter and a Non-Contact Precision Method of Temperature Calibration

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216305%3A26620%2F20%3APU137560" target="_blank" >RIV/00216305:26620/20:PU137560 - isvavai.cz</a>
Result on the web
<a href="https://ieeexplore.ieee.org/abstract/document/9146342/?casa_token=RITeHDdpl-4AAAAA:p1k5VLKW-0TfjK4D-CvPPS1bU9MUuyyTdXXScFONtZKEnXqi3vDrLn4HdSngfSMT1saBx7NzUnY" target="_blank" >https://ieeexplore.ieee.org/abstract/document/9146342/?casa_token=RITeHDdpl-4AAAAA:p1k5VLKW-0TfjK4D-CvPPS1bU9MUuyyTdXXScFONtZKEnXqi3vDrLn4HdSngfSMT1saBx7NzUnY</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1109/JMEMS.2020.3008867" target="_blank" >10.1109/JMEMS.2020.3008867</a>

Result language
angličtina
Original language name
A SiN Microcalorimeter and a Non-Contact Precision Method of Temperature Calibration
Original language description
A dual-channel flow-through microcalorimeter device is presented along with a non-contact precision method of temperature calibration. A microfluidic channel with a volume of approximate to 550 pL in a spiral layout was fabricated from low-stress nitride suspended over a cavity in a silicon substrate. The thin-film heater and resistive temperature detector (RTD) on the channel were defined by a patterned Ti layer. The device exhibited a rapid thermal response with the following thermal characteristics: a time constant of approximate to 10.5 ms, a heat conductance of approximate to 152 mu W. K-1 and a heat capacitance of approximate to 1.6 mu J . K-1 on average based on the measurements of nine separate units fabricated on the same wafer. Further, the melting curve analysis (MCA) of a double-stranded DNA was proposed as a non-contact method of microcalorimeter RTD calibration. The method revealed that the measurement by the RTD underestimates the temperature of the channel interior by an amount of nearly 15%, at approximate to 9 mW. At this dissipated power level, the method also revealed a spatial nonuniformity of approximate to +/- 0.8 degrees C across the microcalorimeter. [2020-0173]
Czech name
—
Czech description
—

Type
J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database
CEP classification
—
OECD FORD branch
20303 - Thermodynamics

Project
<a href="/en/project/GA17-20716S" target="_blank" >GA17-20716S: Highly precise temperature mapping and heat balance monitoring of living cells</a><br>
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year
2020
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Similar results(10)