Transparent and conductive titanium nitride thin films for implantable bioelectronics deposited at low temperature using two Kaufman ion-beam sources

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216305%3A26620%2F22%3APU150824" target="_blank" >RIV/00216305:26620/22:PU150824 - isvavai.cz</a>

Result on the web

<a href="https://www.eeict.cz/eeict_download/archiv/sborniky/EEICT_2022_sbornik_1_v2.pdf" target="_blank" >https://www.eeict.cz/eeict_download/archiv/sborniky/EEICT_2022_sbornik_1_v2.pdf</a>

DOI - Digital Object Identifier

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Result language

angličtina

Original language name

Transparent and conductive titanium nitride thin films for implantable bioelectronics deposited at low temperature using two Kaufman ion-beam sources

Original language description

This work proposes ultra-thin films of titanium nitride as a material for the realization of transparent and conductive layers suitable for implantable bioelectronics. Results further show that good results of crystallography, transmittance, and sheet resistance can be achieved for thin films with thicknesses of 15 nm and 20 nm deposited at the beam energy of the primary ion source of 400 eV and temperature below 100 °C.

Czech name

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Czech description

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Type

D - Article in proceedings

CEP classification

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OECD FORD branch

20200 - Electrical engineering, Electronic engineering, Information engineering

Project

<a href="/en/project/LM2018110" target="_blank" >LM2018110: CzechNanoLab research infrastructure</a><br>

Continuities

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year

2022

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Article name in the collection

Proceedings II of the Conference Student EEICT General papers

ISBN

978-8-0214-6029-4

ISSN

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e-ISSN

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Number of pages

4

Pages from-to

84-87

Publisher name

Brno University of Technology, Faculty of Electrical Engineering and Communication

Place of publication

Brno

Event location

Brno

Event date

Apr 26, 2022

Type of event by nationality

WRD - Celosvětová akce

UT code for WoS article

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