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Optical method for determining the power spectral density function of randomly rough surfaces by simultaneous processing of spectroscopic reflectometry, variable-angle spectroscopic ellipsometry and angle-resolved scattering data

The result's identifiers

  • Result code in IS VaVaI

    <a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216305%3A26620%2F23%3APU148507" target="_blank" >RIV/00216305:26620/23:PU148507 - isvavai.cz</a>

  • Result on the web

    <a href="https://www.sciencedirect.com/science/article/pii/S0030402623002711?via%3Dihub" target="_blank" >https://www.sciencedirect.com/science/article/pii/S0030402623002711?via%3Dihub</a>

  • DOI - Digital Object Identifier

    <a href="http://dx.doi.org/10.1016/j.ijleo.2023.170775" target="_blank" >10.1016/j.ijleo.2023.170775</a>

Alternative languages

  • Result language

    angličtina

  • Original language name

    Optical method for determining the power spectral density function of randomly rough surfaces by simultaneous processing of spectroscopic reflectometry, variable-angle spectroscopic ellipsometry and angle-resolved scattering data

  • Original language description

    Two samples of silicon-single crystal substrates with randomly rough surfaces covered by native oxide layers are investigated by means of angle-resolved scattering, spectroscopic reflectometry and variable-angle spectroscopic ellipsometry. For each sample, the experimental optical data are processed simultaneously to determine the power spectral density functions, which are modeled by exponentials of quadratic splines. The thicknesses of native oxide layers are also determined. The influence of roughness on the reflectance and ellipsometry is described by the combination of the scalar diffraction theory, which is used for the part of roughness with low spatial frequencies, and the Rayleigh-Rice theory, which is used for the part of roughness with high and moderate spatial frequencies. The separation of the roughness into the parts with low and high/moderate spatial frequencies is performed using a bound dependent on the wavelength of the incident light. The PSDFs determined by the optical method are compared with the PSDFs determined by processing the AFM scans.

  • Czech name

  • Czech description

Classification

  • Type

    J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database

  • CEP classification

  • OECD FORD branch

    10306 - Optics (including laser optics and quantum optics)

Result continuities

  • Project

    <a href="/en/project/FV40328" target="_blank" >FV40328: Realization of layered systems with required spectral dependencies of reflectance and transmittance in the middle ultraviolet spectral range</a><br>

  • Continuities

    P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Others

  • Publication year

    2023

  • Confidentiality

    S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Data specific for result type

  • Name of the periodical

    Optik

  • ISSN

    1618-1336

  • e-ISSN

  • Volume of the periodical

    280

  • Issue of the periodical within the volume

    170775

  • Country of publishing house

    DE - GERMANY

  • Number of pages

    13

  • Pages from-to

    „“-„“

  • UT code for WoS article

    000967355200001

  • EID of the result in the Scopus database

    2-s2.0-85150452381