Optical method for determining the power spectral density function of randomly rough surfaces by simultaneous processing of spectroscopic reflectometry, variable-angle spectroscopic ellipsometry and angle-resolved scattering data

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216305%3A26620%2F23%3APU148507" target="_blank" >RIV/00216305:26620/23:PU148507 - isvavai.cz</a>

Result on the web

<a href="https://www.sciencedirect.com/science/article/pii/S0030402623002711?via%3Dihub" target="_blank" >https://www.sciencedirect.com/science/article/pii/S0030402623002711?via%3Dihub</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1016/j.ijleo.2023.170775" target="_blank" >10.1016/j.ijleo.2023.170775</a>

Result language

angličtina

Original language name

Optical method for determining the power spectral density function of randomly rough surfaces by simultaneous processing of spectroscopic reflectometry, variable-angle spectroscopic ellipsometry and angle-resolved scattering data

Original language description

Two samples of silicon-single crystal substrates with randomly rough surfaces covered by native oxide layers are investigated by means of angle-resolved scattering, spectroscopic reflectometry and variable-angle spectroscopic ellipsometry. For each sample, the experimental optical data are processed simultaneously to determine the power spectral density functions, which are modeled by exponentials of quadratic splines. The thicknesses of native oxide layers are also determined. The influence of roughness on the reflectance and ellipsometry is described by the combination of the scalar diffraction theory, which is used for the part of roughness with low spatial frequencies, and the Rayleigh-Rice theory, which is used for the part of roughness with high and moderate spatial frequencies. The separation of the roughness into the parts with low and high/moderate spatial frequencies is performed using a bound dependent on the wavelength of the incident light. The PSDFs determined by the optical method are compared with the PSDFs determined by processing the AFM scans.

Czech name

—

Czech description

—

Type

J_imp - Article in a specialist periodical, which is included in the Web of Science database

CEP classification

—

OECD FORD branch

10306 - Optics (including laser optics and quantum optics)

Project

<a href="/en/project/FV40328" target="_blank" >FV40328: Realization of layered systems with required spectral dependencies of reflectance and transmittance in the middle ultraviolet spectral range</a><br>

Continuities

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year

2023

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical

Optik

ISSN

1618-1336

e-ISSN

—

Volume of the periodical

280

Issue of the periodical within the volume

170775

Country of publishing house

DE - GERMANY

Number of pages

13

Pages from-to

„“-„“

UT code for WoS article

000967355200001

EID of the result in the Scopus database

2-s2.0-85150452381