Study of Influence of Fluorocarbons in Argon - Oxygen Plasma

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F44555601%3A13430%2F99%3A00000107" target="_blank" >RIV/44555601:13430/99:00000107 - isvavai.cz</a>

Result on the web

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DOI - Digital Object Identifier

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Result language

angličtina

Original language name

Study of Influence of Fluorocarbons in Argon - Oxygen Plasma

Original language description

The aim of the present work is to study the decomposition of the polytetrafluoroethylene and the role in this way created atomic fluorine and fluorocarbon radicals on the behaviour of the argon plasma parameters. Mass spectrometry was used for qualitative chemical analysis of the effluents. The results of mass spectrometric measurements show that the products of decomposition of teflon are species like fluorocarbon radicals ( CF3, CF2, CF) and atomic fluorine F. A comparison of the results obtained by means of the mass spectroscopy and by means of the optical emission spectroscopy helps us to understand of the reaction mechanism.

Czech name

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Czech description

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Type

A - Audiovisual production

CEP classification

BL - Plasma physics and discharge through gases

OECD FORD branch

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Project

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Continuities

Z - Vyzkumny zamer (s odkazem do CEZ)

Publication year

1999

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

ISBN

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Place of publication

Gent

Publisher/client name

Universiteit Gent

Version

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Carrier ID

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