Precision of Silicon Oxynitride Refractive-Index Profile Retrieval Using Optical Characterization

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F46747885%3A24220%2F21%3A00008998" target="_blank" >RIV/46747885:24220/21:00008998 - isvavai.cz</a>

Alternative codes found

RIV/61389021:_____/21:00560455

Result on the web

<a href="http://przyrbwn.icm.edu.pl/APP/PDF/140/app140z3p04.pdf" target="_blank" >http://przyrbwn.icm.edu.pl/APP/PDF/140/app140z3p04.pdf</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.12693/aphyspola.140.215" target="_blank" >10.12693/aphyspola.140.215</a>

Result language

angličtina

Original language name

Precision of Silicon Oxynitride Refractive-Index Profile Retrieval Using Optical Characterization

Original language description

Layers with a gradient refractive-index profile are an attractive alternative to conventional homogeneous stack coatings. However, the optical characterization and monitoring of the graded refractive-index profile is a complex issue that has usually been solved with a simplified model of mixed materials. Although such an approach provides a solution to the problem, the precision, which can be expected from the optical characterization of the refractive-index gradient, remains unclear. In this work, we study the optical characterization of SiOxNy layers deposited via reactive dual ion beam sputtering. To characterize the deposited layers, we use several methods including reflectance and transmittance spectra at a broad range of incident angles together with spectral ellipsometry. All the data were simultaneously fitted with a general profile of the refractive index. The expected profile used in our fit was based on the characterization of SiOxNy layers with varying stoichiometry. By altering the profile, we discussed the sensitivity of alternation on the fit quality and we studied the ambiguity of the merit-function minimization. We demonstrate that while the scanning of particular parameters of the profile can be seemingly very precise, we obtain a very good agreement between the experimental data and the model for a broad range of gradient shapes. Our calculation shows that the refractive-index value on the major part of the profile can differ as much as 0.02 from the mean value.

Czech name

—

Czech description

—

Type

J_imp - Article in a specialist periodical, which is included in the Web of Science database

CEP classification

—

OECD FORD branch

10300 - Physical sciences

Project

<a href="/en/project/EF16_026%2F0008390" target="_blank" >EF16_026/0008390: Partnership for excellence in superprecise optics</a><br>

Continuities

S - Specificky vyzkum na vysokych skolach

Publication year

2021

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical

Acta Physica Polonica A

ISSN

0587-4246

e-ISSN

—

Volume of the periodical

140

Issue of the periodical within the volume

3

Country of publishing house

PL - POLAND

Number of pages

7

Pages from-to

215-221

UT code for WoS article

000713033100004

EID of the result in the Scopus database

2-s2.0-85119586425