Iron doped thin TiO2 films synthesized with the RF PECVD method

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F46747885%3A24620%2F15%3A00002538" target="_blank" >RIV/46747885:24620/15:00002538 - isvavai.cz</a>
Result on the web
<a href="http://www.sciencedirect.com/science/article/pii/S0272884215002904" target="_blank" >http://www.sciencedirect.com/science/article/pii/S0272884215002904</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1016/j.ceramint.2015.02.071" target="_blank" >10.1016/j.ceramint.2015.02.071</a>

Result language
angličtina
Original language name
Iron doped thin TiO2 films synthesized with the RF PECVD method
Original language description
Iron doped titanium dioxide coatings were synthesized with the help of RF plasma enhanced CVD technique. As a source of titanium, titanium chloride (IV) TiCl4 was used while iron pentacarbonyl (0) Fe(CO)5 served as iron supply. The coatings were diagnosed using Scanning Electron Microscopy (SEM) and Atomic Force Microscopy (AFM). Their elemental and chemical composition was studied with the help of X-ray energy dispersive spectroscopy (EDS) and Fourier transform infrared (FTIR) spectroscopy, respectively. For the determination of their optical properties, variable angle spectroscopic ellipsometry (VASE) and ultraviolet-visible (UV-Vis) spectroscopy techniques were used. Iron content in the range of 0.07?11.5 at% was found in the films. Apart from oxygen, titanium and iron, a presence of trace amounts of chlorine, very likely originating from the titanium precursor, was recorded. FTIR studies showed that iron was built-in in the structure of TiO2 matrix. Surface roughness, assessed usin
Czech name
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Czech description
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Type
J<sub>x</sub> - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)
CEP classification
BL - Plasma physics and discharge through gases
OECD FORD branch
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Project
<a href="/en/project/LO1201" target="_blank" >LO1201: DEVELOPMENT OF THE INSTITUTE FOR NANOMATERIALS, ADVANCED TECHNOLOGIES AND INNOVATION</a><br>
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year
2015
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

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