Influence of Technological Parameters of Deposition on Physical and Mechanical Properties of Vacuum-Arc Multilayer Nitride Coatings Based on Chromium and Niobium

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F46747885%3A24620%2F24%3A00012289" target="_blank" >RIV/46747885:24620/24:00012289 - isvavai.cz</a>

Result on the web

<a href="https://mfint.imp.kiev.ua/en/abstract/v46/i01/0023.html" target="_blank" >https://mfint.imp.kiev.ua/en/abstract/v46/i01/0023.html</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.15407/mfint.46.01.0023" target="_blank" >10.15407/mfint.46.01.0023</a>

Result language

angličtina

Original language name

Influence of Technological Parameters of Deposition on Physical and Mechanical Properties of Vacuum-Arc Multilayer Nitride Coatings Based on Chromium and Niobium

Original language description

Establishing the regularities of the structure and phase formation of vacuum-arc multilayer nitride coatings at different technological parameters is important for the predicted obtaining of the required properties of multilayer systems. To analyse the influence on the physical and mechanical properties, the following technological parameters of deposition vacuum-arc multilayer nitride coatings are chosen: pressure of the reaction gas in the vacuum chamber (0.08–0.27 Pa), constant negative voltage on the substrate (70–200 V), layer thickness (17–150 nm) and number of layers (68, 270, 1080). Chromium and niobium nitrides, which are promising materials in many fields of application, are chosen as components of vacuum-arc coatings. The research show that vacuum-arc multilayer nitride coatings СrN/NbN obtained under different technological conditions have high planarity of layers and practically no drop phase in the volume of the coating. The analysis of heterogeneity of the structural and phase state of the coatings is carried out by the root-mean-square deviation of the vacuum-arc coating microhardness. The trends in changes in physical and mechanical properties are evaluated based on the average values of microhardness, contact modulus of elasticity, and others ratios.

Czech name

—

Czech description

—

Type

J_imp - Article in a specialist periodical, which is included in the Web of Science database

CEP classification

—

OECD FORD branch

20500 - Materials engineering

Project

—

Continuities

I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Publication year

2024

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical

Metallofizika i Noveishie Tekhnologii

ISSN

1024-1809

e-ISSN

—

Volume of the periodical

46

Issue of the periodical within the volume

1

Country of publishing house

UA - UKRAINE

Number of pages

24

Pages from-to

23-46

UT code for WoS article

001304430600003

EID of the result in the Scopus database

2-s2.0-85188955001