Metastable structures in magnetron sputtered W–Zr thin-film alloys

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F49777513%3A23520%2F21%3A43962243" target="_blank" >RIV/49777513:23520/21:43962243 - isvavai.cz</a>

Result on the web

<a href="https://doi.org/10.1016/j.jallcom.2021.161558" target="_blank" >https://doi.org/10.1016/j.jallcom.2021.161558</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1016/j.jallcom.2021.161558" target="_blank" >10.1016/j.jallcom.2021.161558</a>

Result language

angličtina

Original language name

Metastable structures in magnetron sputtered W–Zr thin-film alloys

Original language description

Binary W–Zr thin-film alloys with different metastable structures were prepared by dc magnetron co-sputtering of W and Zr targets in argon atmosphere on unheated and unbiased substrates. The effect of the elemental composition on the formation of different structures and phases was studied in a very wide range of 3–99 at.% Zr. The microstructure and properties of the films were related to the individual metastable structures prepared. We found that W-rich films with an α-W(Zr) solid solution structure can be prepared in much wider range of the elemental composition (up to 24 at.% Zr) than indicated in the equilibrium W–Zr phase diagram. These films exhibited an enhanced hardness (up to 16.1 GPa) and a reduced residual stress (down to −0.05 GPa). Amorphous W–Zr films with a very low surface roughness (down to 0.4 nm) and metallic glass features were prepared with the Zr content between 33 and 83 at.%. The hardness of these films gradually decreased with increasing Zr content due to reducing average bond energy. All films were in the compressive state in contrast to the crystalline ones. The structure of crystalline Zr-rich films with higher than 88 at.% Zr was predominantly dual-phased exhibiting a gradual transition from a metastable β-Zr(W) solid solution (86–96 at.% Zr) through a metastable ω-Zr(W) solid solution (94–100 at.% Zr) to the thermodynamically stable α-Zr phase (99–100 at.% Zr) with increasing Zr (decreasing W) content. We also observed the formation of dual-phase glassy-crystalline structures in the transition zones between fully crystalline and glassy films.

Czech name

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Czech description

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Type

J_imp - Article in a specialist periodical, which is included in the Web of Science database

CEP classification

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OECD FORD branch

20506 - Coating and films

Project

—

Continuities

S - Specificky vyzkum na vysokych skolach<br>I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Publication year

2021

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical

JOURNAL OF ALLOYS AND COMPOUNDS

ISSN

0925-8388

e-ISSN

—

Volume of the periodical

888

Issue of the periodical within the volume

25 DEC 2021

Country of publishing house

CH - SWITZERLAND

Number of pages

9

Pages from-to

"161558-1"-"161558-9"

UT code for WoS article

000704802400002

EID of the result in the Scopus database

2-s2.0-85112564991