Preparation of multi-composite nanoparticle-based thin films for gas sensing

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F49777513%3A23520%2F23%3A43969305" target="_blank" >RIV/49777513:23520/23:43969305 - isvavai.cz</a>
Alternative codes found
RIV/49777513:23520/23:43969317
Result on the web
—
DOI - Digital Object Identifier
—

Result language
angličtina
Original language name
Preparation of multi-composite nanoparticle-based thin films for gas sensing
Original language description
In this project, the films were prepared using the Nanogen-Trio NP source equipped with three 1′′ magnetrons – Cu, W, Pd, mounted on a custom-built deposition chamber and sputtered by a DC power supply. The depositions were executed in Ar + O2 gas mixture and deposition parameters were effectively controlled to obtain a sufficient deposition rate. During deposition, the operation of each magnetron was controlled using an in-house developed software allowing the preparation of thin films with a mixture of NPs with a defined volumetric ratio of the individual materials.This work demonstrates the versatility of our custom-built gas aggregation source that enables us to effectively control the deposition parameters for each target material thereby facilitating the preparation of multi-composite NP-based thin film giving the best sensorial response.
Czech name
—
Czech description
—

Publication year
2023
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Similar results(10)