Detailed pathway for a fast low-temperature synthesis of strongly thermochromic W-doped VO2 films with a low transition temperature

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F49777513%3A23520%2F23%3A43969360" target="_blank" >RIV/49777513:23520/23:43969360 - isvavai.cz</a>

Result on the web

<a href="https://doi.org/10.1088/1361-6463/acf86b" target="_blank" >https://doi.org/10.1088/1361-6463/acf86b</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1088/1361-6463/acf86b" target="_blank" >10.1088/1361-6463/acf86b</a>

Result language

angličtina

Original language name

Detailed pathway for a fast low-temperature synthesis of strongly thermochromic W-doped VO2 films with a low transition temperature

Original language description

We report the discharge characteristics, and population of chosen atomic neutral (V, O and Ar) and ionic (V+, V2+, O+, and Ar+) species in the discharge during low-temperature (350 °C) depositions of W-doped VOx films onto a 170 nm thick Y-stabilized ZrO2 layer on a 1 mm thick conventional soda-lime glass. The depositions were performed using reactive deep oscillation magnetron sputtering with a pulsed O2 flow control and to-substrate O2 injection into a high-density plasma in front of the sputter V-W target. The pre-selected critical values of the oxygen partial pressure were in the range from 82 mPa to 92 mPa. Optical emission spectroscopy proved a relatively high density of O atoms in front of the substrate, which is important to produce the W-doped VO2 films. It was found that the setting of the amount of O2 in the gas mixture determines not only the elemental and phase composition of the films and their deposition rate but also the crystallinity of the thermochromic VO2 phase in them. The crystalline W-doped VO2 films with a low transition temperature of 28 °C exhibited a high modulation of the solar energy transmittance of 8.9%. The results are important for further improvement of this new scalable sputter deposition technique for a fast (53 nm/min at a target-substrate distance of 100 mm in this work) low-temperature synthesis of high-performance durable thermochromic VO2-based multilayer coatings designed for smart-window applications.

Czech name

—

Czech description

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Type

J_imp - Article in a specialist periodical, which is included in the Web of Science database

CEP classification

—

OECD FORD branch

20506 - Coating and films

Project

<a href="/en/project/GA21-28277S" target="_blank" >GA21-28277S: High-performance thermochromic VO2-based coatings with a low transition temperature prepared using reactive pulsed plasmas</a><br>

Continuities

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year

2023

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical

JOURNAL OF PHYSICS D-APPLIED PHYSICS

ISSN

0022-3727

e-ISSN

1361-6463

Volume of the periodical

56

Issue of the periodical within the volume

50

Country of publishing house

GB - UNITED KINGDOM

Number of pages

10

Pages from-to

1-10

UT code for WoS article

001069488800001

EID of the result in the Scopus database

2-s2.0-85173294023