Optical layer development for thin films thermal conductivity measurement by pulsed photothermal radiometry
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F49777513%3A23640%2F15%3A43924866" target="_blank" >RIV/49777513:23640/15:43924866 - isvavai.cz</a>
Result on the web
<a href="http://dx.doi.org/10.1063/1.4904876" target="_blank" >http://dx.doi.org/10.1063/1.4904876</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1063/1.4904876" target="_blank" >10.1063/1.4904876</a>
Alternative languages
Result language
angličtina
Original language name
Optical layer development for thin films thermal conductivity measurement by pulsed photothermal radiometry
Original language description
Measurement of thermal conductivity and volumetric specific heat of optically transparent thin films present a challenge for optical based measurement methods like pulsed photothermal radiometry. We present two approaches: (i) addition of an opaque optical layer to the surface and (ii) approximate correction of the mathematical model to incorporate semitransparency of the film. Tested were different single layer and multilayer additive optical layers. Presented are thermal properties measurements results for 6 different thin films with wide range of thermal conductivity in three configurations of surface: as deposited, added Ti layer and added Ti/TiAlSiN layer. Measurements were done in dependence on temperature from room temperature to 500oC. Suitability of different measurement configurations is discussed and results of high temperature testing of different optical layers are presented.
Czech name
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Czech description
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Classification
Type
J<sub>x</sub> - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)
CEP classification
BJ - Thermodynamics
OECD FORD branch
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Result continuities
Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)
Others
Publication year
2015
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Review of Scientific Instruments
ISSN
0034-6748
e-ISSN
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Volume of the periodical
86
Issue of the periodical within the volume
1
Country of publishing house
US - UNITED STATES
Number of pages
9
Pages from-to
"14902-1-1"-"14902-9"
UT code for WoS article
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EID of the result in the Scopus database
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