Towards high quality ITO coatings: The impact of nitrogen admixture in HiPIMS discharges
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F60076658%3A12310%2F18%3A43897191" target="_blank" >RIV/60076658:12310/18:43897191 - isvavai.cz</a>
Alternative codes found
RIV/68378271:_____/18:00489659
Result on the web
<a href="https://kopernio.com/viewer?doi=10.1016/j.surfcoat.2017.12.030&route=6" target="_blank" >https://kopernio.com/viewer?doi=10.1016/j.surfcoat.2017.12.030&route=6</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1016/j.surfcoat.2017.12.030" target="_blank" >10.1016/j.surfcoat.2017.12.030</a>
Alternative languages
Result language
angličtina
Original language name
Towards high quality ITO coatings: The impact of nitrogen admixture in HiPIMS discharges
Original language description
The paper reports controlled deposition of optically transparent and electrically conductive ITO films prepared by a combination of rf (13.56 MHz) and High Power Impulse Magnetron Sputtering (HiPIMS) systems without any post deposition thermal treatment/annealing. It is shown that (i) reactive admixture of N-2 gas to the process and (ii) pressure in the deposition chamber enable to optimize optical properties of ITO films. Furthermore, the changes of electrical resistivity were observed, too. The variation of these ITO properties is attributed to change of crystalline structure measured by XRD methods.
Czech name
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Czech description
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Classification
Type
J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database
CEP classification
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OECD FORD branch
10305 - Fluids and plasma physics (including surface physics)
Result continuities
Project
<a href="/en/project/GA16-14024S" target="_blank" >GA16-14024S: Investigation of nanostructured thin films formation deposited by plasma assisted techniques</a><br>
Continuities
S - Specificky vyzkum na vysokych skolach<br>I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace
Others
Publication year
2018
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Surface and Coatings Technology
ISSN
0257-8972
e-ISSN
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Volume of the periodical
335
Issue of the periodical within the volume
FEB 15 2018
Country of publishing house
CH - SWITZERLAND
Number of pages
8
Pages from-to
126-133
UT code for WoS article
000424720800014
EID of the result in the Scopus database
2-s2.0-85037984029