Measuring System for the Langmuir Probe Diagnostics of the Plasma
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F60076658%3A12410%2F01%3A00003040" target="_blank" >RIV/60076658:12410/01:00003040 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Alternative languages
Result language
angličtina
Original language name
Measuring System for the Langmuir Probe Diagnostics of the Plasma
Original language description
The paper deals with construction of the high - speed measuring system for the "insitu" Langmuir Probe diagnostics of the plasma. The system is dedicated for special applications in the plasma - chemical deposition processes.
Czech name
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Czech description
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Classification
Type
D - Article in proceedings
CEP classification
BL - Plasma physics and discharge through gases
OECD FORD branch
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Result continuities
Project
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Continuities
Z - Vyzkumny zamer (s odkazem do CEZ)
Others
Publication year
2001
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Article name in the collection
CO-MAT-TECH 2001
ISBN
80-227-1591-3
ISSN
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e-ISSN
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Number of pages
6
Pages from-to
11-16
Publisher name
Slovenská technická univerzita v Bratislavě
Place of publication
Bratislava
Event location
Materialovotechnologická fakulta v Trnave
Event date
Aug 25, 2001
Type of event by nationality
EUR - Evropská akce
UT code for WoS article
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