Numerical Methods Concerning Optical Diagnostics of Low Temperature Plasmas

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F60076658%3A12410%2F01%3A00003046" target="_blank" >RIV/60076658:12410/01:00003046 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Result language
angličtina
Original language name
Numerical Methods Concerning Optical Diagnostics of Low Temperature Plasmas
Original language description
The study of the working gas flow and its interaction with the substrate is an important part of diagnostics of plasma in the plasma-chemical reactors. Good knowledge of the parameters of plasma is necessary to understand to processes that take place atplasma-chemical deposition of thin films. We have used the optical diagnostics by holographic interferometer for this purpose. The boundary between subsonic and supersonic flowing gas has been determined by means of interferograms. The distribution of the phase shift into the observed object compared to the state without flowing gas has been determined from the interferogram as well. That gives the possibility of another work purposeful obtaining distribution of mass density into the flowing gas and temperature or pressure, respectively. Studium proudění pracovního plynu a jeho interakce se substrátem jsou důležité části diagnostiky plazmatu v plasma-chemických reaktorech. Dobrá znalost parametrů plazmatu je nutná k pochopení procesů, k
Czech name
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Czech description
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Publication year
2001
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

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