Thermodynamics of Moist Air for Vacuum Technology

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F60162694%3AG43__%2F21%3A00557653" target="_blank" >RIV/60162694:G43__/21:00557653 - isvavai.cz</a>
Result on the web
<a href="http://ecst.ecsdl.org/" target="_blank" >http://ecst.ecsdl.org/</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1149/10501.0299ecst" target="_blank" >10.1149/10501.0299ecst</a>

Result language
angličtina
Original language name
Thermodynamics of Moist Air for Vacuum Technology
Original language description
The paper is focused on the developing a predictive mathematical model for describing thermodynamic processes connected with the moist air depressurization in vacuum chambers. Equations of the mathematical description are based on principles of the energy and mass conservation, which are complemented by the moist air thermodynamics, the state behavior of water and vapor, including principles of the critical flow. The described problem has been solved using the MATLAB software. In the paper, two cases are applied and discussed: the vacuum drying and the specimen chamber of an environmental scanning electron microscope. The specific requirements are especially important for environmental scanning electron microscopes, where it is possible to observe samples, which contain water, in their natural condition. If the air pressure, temperature and humidity do not have suitable values, observed sample may be dried or damaged.
Czech name
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Czech description
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Project
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Continuities
S - Specificky vyzkum na vysokych skolach<br>I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Publication year
2021
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

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