Reliable Extrapolation of Vapour Pressure Data using Simultaneous Multi-Property Correlation for TMGa and TMAl

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F60461373%3A22340%2F05%3A00014461" target="_blank" >RIV/60461373:22340/05:00014461 - isvavai.cz</a>

Result on the web

—

DOI - Digital Object Identifier

—

Result language

angličtina

Original language name

Reliable Extrapolation of Vapour Pressure Data using Simultaneous Multi-Property Correlation for TMGa and TMAl

Original language description

The paper describes a method of simultaneous multi-property correlation (further denoted as SimCor) of vapour pressure and of the related thermal data (heat capacities in the solid or liquid phase, ideal gas heat capacities and calorimetrically obtainedsublimation or vaporisation enthalpies) which is used for correlation of vapour pressure as a function of temperature. This method was used to determine the parameters of the Cox correlation equation for two frequently used metalorganic precursors, trimethylgallium and trimethylaluminium in the temperature range from 225 K to 305 K and from 243 K to 400 K, respectively. Enthalpies of vaporisation, of sublimation and of fusion for trimethylgallium and trimethylaluminium derived from the SimCor correlation are also reported. For other metalorganic precursors, for which new vapour pressures have been determined in our previous work, the method of simultaneous multi-property correlation was not applicable since the related thermal data are

Czech name

Spolehlivá extrapolace tlaku nasycených par pomocí simultánní korelace aplikovaná na TMGa a TMAl

Czech description

The paper describes a method of simultaneous multi-property correlation (further denoted as SimCor) of vapour pressure and of the related thermal data (heat capacities in the solid or liquid phase, ideal gas heat capacities and calorimetrically obtainedsublimation or vaporisation enthalpies) which is used for correlation of vapour pressure as a function of temperature. This method was used to determine the parameters of the Cox correlation equation for two frequently used metalorganic precursors, trimethylgallium and trimethylaluminium in the temperature range from 225 K to 305 K and from 243 K to 400 K, respectively. Enthalpies of vaporisation, of sublimation and of fusion for trimethylgallium and trimethylaluminium derived from the SimCor correlation are also reported. For other metalorganic precursors, for which new vapour pressures have been determined in our previous work, the method of simultaneous multi-property correlation was not applicable since the related thermal data are

Type

O - Miscellaneous

CEP classification

CF - Physical chemistry and theoretical chemistry

OECD FORD branch

—

Project

<a href="/en/project/GA203%2F04%2F0484" target="_blank" >GA203/04/0484: Accurate measurement of vapour pressure of metal organic precursors</a><br>

Continuities

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year

2005

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů