Influence of the Growth Parameters on RF-Sputtered CNTs and Their Temperature-Selective Application in Gas Sensors
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F60461373%3A22340%2F25%3A43932967" target="_blank" >RIV/60461373:22340/25:43932967 - isvavai.cz</a>
Result on the web
<a href="https://pubs.acs.org/doi/10.1021/acsomega.5c03699?ref=pdf" target="_blank" >https://pubs.acs.org/doi/10.1021/acsomega.5c03699?ref=pdf</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1021/acsomega.5c03699" target="_blank" >10.1021/acsomega.5c03699</a>
Alternative languages
Result language
angličtina
Original language name
Influence of the Growth Parameters on RF-Sputtered CNTs and Their Temperature-Selective Application in Gas Sensors
Original language description
This work deals with the peculiarities of the growth of carbon nanotubes (CNTs) by radiofrequency (RF) magnetron sputtering and with the effect of deposition parameters on the RF sputtering. In the deposition process, a type of plasma gas, power of the RF generator, deposition time of catalysts, and a type of catalyst metals were modified to reveal the impact of these changes on the CNT's growth. The obtained nanostructures were studied by scanning electron microscopy (SEM) and transmission electron microscopy (TEM) as well as energy-dispersive X-ray (EDX) and Raman spectroscopies. The best results were obtained when the deposition conditions were as follows: argon-assisted plasma, generator power 120 W, catalyst sputtering duration 20 s, and nickel serving as a catalyst. A flexible propylene glycol vapor (PGV) and hydrogen peroxide vapor (HPV) sensors based on RF-sputtered CNTs combined with the Fe2O3:ZnO material were fabricated, and its DC and AC gas-sensing properties were studied. Impedance spectroscopy was used to evaluate an equivalent electrical circuit of the sensor. Temperature modulation led to the effective use of the same nanostructured film for PGV and HPV detection at 150 and 50 degrees C, respectively. At 50 degrees C temperature, the sensor response ranged from 3 to 27 values in the HPV concentrations of 0.5-25 ppm, respectively, demonstrating short response/recovery times, high response repeatability, and temporal stability.
Czech name
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Czech description
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Classification
Type
J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database
CEP classification
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OECD FORD branch
10403 - Physical chemistry
Result continuities
Project
—
Continuities
I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace
Others
Publication year
2025
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
ACS Omega
ISSN
2470-1343
e-ISSN
2470-1343
Volume of the periodical
10
Issue of the periodical within the volume
31
Country of publishing house
US - UNITED STATES
Number of pages
14
Pages from-to
34733-34746
UT code for WoS article
001543619900001
EID of the result in the Scopus database
2-s2.0-105024970467