Optical Emission Spectroscopy of CN x Plasma Species in Hybrid Pulsed Laser Deposition System.
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F61388955%3A_____%2F01%3A54010234" target="_blank" >RIV/61388955:_____/01:54010234 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Alternative languages
Result language
angličtina
Original language name
Optical Emission Spectroscopy of CN x Plasma Species in Hybrid Pulsed Laser Deposition System.
Original language description
Thin CNx films were deposited by hybrid pulsed laser deposition system KrF excimer laser in combination with the additional radio-frequency discharge.
Czech name
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Czech description
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Classification
Type
J<sub>x</sub> - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)
CEP classification
CF - Physical chemistry and theoretical chemistry
OECD FORD branch
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Result continuities
Project
<a href="/en/project/IAA1010110" target="_blank" >IAA1010110: Novel Laser-based Hybrid Technologies for thin Film Deposition</a><br>
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)
Others
Publication year
2001
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Jemná mechanika a optika
ISSN
0447-6441
e-ISSN
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Volume of the periodical
46
Issue of the periodical within the volume
11/12
Country of publishing house
CZ - CZECH REPUBLIC
Number of pages
2
Pages from-to
371-373
UT code for WoS article
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EID of the result in the Scopus database
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