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Anomalous depth distribution of Fe and Co atoms in polyimide implanted to high fluence.

Result description

Polyimide foils were implanted with 40 keV Fe.sup.+./sup. and Co.sup.+./sup. ions to the flunces of 2.5 x 10.sup.16./sup. - 1.25 x 10.sup.17./sup. cm.sup.-2./sup. at ion current densities of 4, 8 and 12 .mu. A/cm.sup.2./sup. Structural and composition alterations of the implanted polymer are studied using transmission electron microscopy and Rutherford back-scattering methods. Ion implantation results in formation of the near-surface carbonaceous layer filled up 25 at. of the embedded metal. Anomalous depth profiles of the metals, consisting of a strong near-surface peak and two weaker ones beyond the implanted layer, are observed. Possible mechanisms of the metal redistribution are discussed.

Keywords

ion implantationpolyimidedopth profilesstructural an composition changes

The result's identifiers

Alternative languages

  • Result language

    angličtina

  • Original language name

    Anomalous depth distribution of Fe and Co atoms in polyimide implanted to high fluence.

  • Original language description

    Polyimide foils were implanted with 40 keV Fe.sup.+./sup. and Co.sup.+./sup. ions to the flunces of 2.5 x 10.sup.16./sup. - 1.25 x 10.sup.17./sup. cm.sup.-2./sup. at ion current densities of 4, 8 and 12 .mu. A/cm.sup.2./sup. Structural and composition alterations of the implanted polymer are studied using transmission electron microscopy and Rutherford back-scattering methods. Ion implantation results in formation of the near-surface carbonaceous layer filled up 25 at. of the embedded metal. Anomalous depth profiles of the metals, consisting of a strong near-surface peak and two weaker ones beyond the implanted layer, are observed. Possible mechanisms of the metal redistribution are discussed.

  • Czech name

  • Czech description

Classification

  • Type

    Jx - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)

  • CEP classification

    BG - Nuclear, atomic and molecular physics, accelerators

  • OECD FORD branch

Result continuities

Others

  • Publication year

    2002

  • Confidentiality

    S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Data specific for result type

  • Name of the periodical

    Nuclear Instruments and Methods in Physics Research. B

  • ISSN

    0168-583X

  • e-ISSN

  • Volume of the periodical

    191

  • Issue of the periodical within the volume

    N/A

  • Country of publishing house

    NL - THE KINGDOM OF THE NETHERLANDS

  • Number of pages

    5

  • Pages from-to

    695-699

  • UT code for WoS article

  • EID of the result in the Scopus database

Basic information

Result type

Jx - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)

Jx

CEP

BG - Nuclear, atomic and molecular physics, accelerators

Year of implementation

2002