Structural changes of plasma deposited SiOxCyHz thin films attained by thermal annealing

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F61389005%3A_____%2F04%3A00105672" target="_blank" >RIV/61389005:_____/04:00105672 - isvavai.cz</a>

Alternative codes found

RIV/00216224:14310/04:00021214

Result on the web

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DOI - Digital Object Identifier

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Result language

angličtina

Original language name

Structural changes of plasma deposited SiOxCyHz thin films attained by thermal annealing

Original language description

The objective of the present work was to investigate the influence of thermal annealing on the optical and mechanical properties as well as on the chemical structure of plasma deposited SiOxCyHz films. The films were prepared by PECVD from HMDSO/oxygen mixtures under a wide range of deposition conditions. Their optical and mechanical properties were studied by spectroscopic ellipsometry and depth sensing indentation technique, respectively. The atomic composition was determined by RBS and ERDA measurements. FTIR analysis was used to find the densities of particular chemical bonds in the films. The annealed films exhibited changes of the refractive index and extinction coefficient. The refractive index always decreased with increasing annealing temperature. The observed increase in hardness and elastic modulus after annealing was probably correlated with dehydration of the films and an increase of Si-O-Si bonds with increasing annealing temperature.

Czech name

Strukturální změny plazmově deponovaných tenkých vrstev SiOxCyHz tepelně zatížených žíháním

Czech description

Je studován vliv žíhání na optické a mechanické vlastnosti a na chemickou strukturu plasmově deponovaných SiOxCyHz filmů. Optické a mechanické vlastnosti jsou studovány spektroskopickou elipsometrií a technikou hloubkově citlivých zářezů. Atomové složeníbylo určeno měřeními RBS a ERDA. Hustoty chemických vazeb ve vrstvě byly určeny analýzou FTIR.

Type

J_x - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)

CEP classification

BG - Nuclear, atomic and molecular physics, accelerators

OECD FORD branch

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Project

Result was created during the realization of more than one project. More information in the Projects tab.

Continuities

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year

2004

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical

Czechoslovak Journal od Physics

ISSN

0011-4626

e-ISSN

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Volume of the periodical

54

Issue of the periodical within the volume

9

Country of publishing house

CZ - CZECH REPUBLIC

Number of pages

6

Pages from-to

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UT code for WoS article

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EID of the result in the Scopus database

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