Physico-chemical properties of plasma-polymerized tetravinylsilane

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F61389005%3A_____%2F07%3A00097581" target="_blank" >RIV/61389005:_____/07:00097581 - isvavai.cz</a>

Alternative codes found

RIV/00216305:26310/07:PU70613

Result on the web

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DOI - Digital Object Identifier

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Result language

angličtina

Original language name

Physico-chemical properties of plasma-polymerized tetravinylsilane

Original language description

Plasma polymer films of tetravinylsilane were deposited on silicon wafers using an RF glow discharge operated in pulsed mode. Microscopic and spectroscopic techniques revealed that physico-chemical properties of plasma polymer depend on the effective power used if the flow rate was constant. The deposition rate (8-165 nm min(-1)) and surface roughness (2.0-5.8 nm) of films varied with the RF power. An organic/inorganic character (C/Si ratio) of films and a content of vinyl groups could be controlled bythe effective power. The refractive index of films increased with power from 1.63 (0.05 W) to 1.75 (10 W) at a wavelength of 633 nm and the extinction coefficient rose sharply with the power from 0.09 (0.05 W) to 0.37 (10 W) at a wavelength of 240 nm. The elastic modulus and hardness of plasma polymer could be varied from 11 GPa (0.05 W) to 30 GPa (10 W) and from 1.4 to 5.9 GPa, respectively. (C) 2006 Elsevier B.V. All rights reserved.

Czech name

Fyzikální a chemická vlastnost plazmaticky polymerizovaného tetravinylsilanu

Czech description

Fyzikální a chemická vlastnost polymerizovaného tetravinylsilanu.

Type

J_x - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)

CEP classification

BG - Nuclear, atomic and molecular physics, accelerators

OECD FORD branch

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Project

Result was created during the realization of more than one project. More information in the Projects tab.

Continuities

Z - Vyzkumny zamer (s odkazem do CEZ)

Publication year

2007

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical

Surface and Coatings Technology

ISSN

0257-8972

e-ISSN

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Volume of the periodical

201

Issue of the periodical within the volume

9-11

Country of publishing house

CH - SWITZERLAND

Number of pages

6

Pages from-to

5512-5517

UT code for WoS article

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EID of the result in the Scopus database

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