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Study of Er+ ion-implanted lithium niobate structure after an annealing procedure by RBS and RBS/channelling

The result's identifiers

  • Result code in IS VaVaI

    <a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F61389005%3A_____%2F10%3A00343535" target="_blank" >RIV/61389005:_____/10:00343535 - isvavai.cz</a>

  • Alternative codes found

    RIV/60461373:22310/10:00022986 RIV/44555601:13440/10:00005553

  • Result on the web

  • DOI - Digital Object Identifier

Alternative languages

  • Result language

    angličtina

  • Original language name

    Study of Er+ ion-implanted lithium niobate structure after an annealing procedure by RBS and RBS/channelling

  • Original language description

    Erbium-doped lithium niobate (Er:LiNbO3) is a prospective photonics component, operating at = 1.5 lm, which could be used as an optical amplifier or waveguide laser. We have focused on the structure of Er:LiNbO3 layers created by 330 keV erbium ion implantation (fluences 1,0x1015, 2,5x1015and 1,0x1016 cm-2) in the X, Z and two various Y crystallographic cuts of LiNbO3. Five hours annealing at 350°C was applied to recrystallize the as-implanted layer and to avoid clustering of Er. Depth distribution of implanted Er has been measured by Rutherford Backscattering Spectroscopy (RBS) using 2 MeV He+ ions. Defects distribution and structural changes have been described using the RBS/channelling method. Data obtained made it possible to reveal the relations between the crystallographic orientation of the implanted crystal and the behaviour during the restoration process. The deepest modified layer has been observed in the perpendicular Y cut, which also exhibits the lowest reconstruction afte

  • Czech name

  • Czech description

Classification

  • Type

    J<sub>x</sub> - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)

  • CEP classification

    BG - Nuclear, atomic and molecular physics, accelerators

  • OECD FORD branch

Result continuities

  • Project

    Result was created during the realization of more than one project. More information in the Projects tab.

  • Continuities

    Z - Vyzkumny zamer (s odkazem do CEZ)

Others

  • Publication year

    2010

  • Confidentiality

    S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Data specific for result type

  • Name of the periodical

    Nuclear Instruments & Methods in Physics Research Section B

  • ISSN

    0168-583X

  • e-ISSN

  • Volume of the periodical

    268

  • Issue of the periodical within the volume

    11-12

  • Country of publishing house

    NL - THE KINGDOM OF THE NETHERLANDS

  • Number of pages

    4

  • Pages from-to

  • UT code for WoS article

    000278702300076

  • EID of the result in the Scopus database