Simulation of RBS spectra with known 3D sample surface roughness
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F61389005%3A_____%2F17%3A00479634" target="_blank" >RIV/61389005:_____/17:00479634 - isvavai.cz</a>
Alternative codes found
RIV/60461373:22310/17:43914207 RIV/44555601:13440/17:43892903
Result on the web
<a href="http://dx.doi.org/10.1016/j.nimb.2017.02.020" target="_blank" >http://dx.doi.org/10.1016/j.nimb.2017.02.020</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1016/j.nimb.2017.02.020" target="_blank" >10.1016/j.nimb.2017.02.020</a>
Alternative languages
Result language
angličtina
Original language name
Simulation of RBS spectra with known 3D sample surface roughness
Original language description
The Rutherford Backscattering Spectrometry (RBS) is a technique for elemental depth profiling with a nanometer depth resolution. Possible surface roughness of analysed samples can deteriorate the RBS spectra and makes their interpretation more difficult and ambiguous. This work describes the simulation of RBS spectra which takes into account real 3D morphology of the sample surface obtained by AFM method. The RBS spectrum is calculated as a sum of the many particular spectra obtained for randomly chosen particle trajectories over sample 3D landscape. The spectra, simulated for different ion beam incidence angles, are compared to the experimental ones measured with 2.0 MeV He-4(+) ions. The main aim of this work is to obtain more definite information on how a particular surface morphology and measuring geometry affects the RBS spectra and derived elemental depth profiles. A reasonable agreement between the measured and simulated spectra was found and the results indicate that the AFM data on the sample surface can be used for the simulation of RBS spectra.
Czech name
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Czech description
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Classification
Type
J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database
CEP classification
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OECD FORD branch
10304 - Nuclear physics
Result continuities
Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)
Others
Publication year
2017
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Nuclear Instruments & Methods in Physics Research Section B
ISSN
0168-583X
e-ISSN
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Volume of the periodical
406
Issue of the periodical within the volume
SEP
Country of publishing house
NL - THE KINGDOM OF THE NETHERLANDS
Number of pages
5
Pages from-to
99-103
UT code for WoS article
000409152800021
EID of the result in the Scopus database
2-s2.0-85013174057