Recent Progress in Ion Beam Fabrication of Integrated Optical Elements
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F61389005%3A_____%2F17%3A00488748" target="_blank" >RIV/61389005:_____/17:00488748 - isvavai.cz</a>
Result on the web
<a href="http://dx.doi.org/10.1109/ICTON.2017.8024871" target="_blank" >http://dx.doi.org/10.1109/ICTON.2017.8024871</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1109/ICTON.2017.8024871" target="_blank" >10.1109/ICTON.2017.8024871</a>
Alternative languages
Result language
angličtina
Original language name
Recent Progress in Ion Beam Fabrication of Integrated Optical Elements
Original language description
Planar optical waveguides and Bragg gratings were designed and written in various optical crystals with medium energy ion implantation. Some examples of the fabricated integrated optical elements are presented in this article: Planar optical waveguides fabricated in Er: LiNbO3 crystal by irradiation with 5 MeV N3+ ions, and Bragg gratings fabricated by multi-energy implantation into a silicon substrate with N+ ions in the 800 keV - 3.5 MeV energy range. The SRIM code was used for planning the optical elements. The ion implanted optical elements were tested by spectroscopic ellipsometry and visible and infrared reflectometry. The results show that the proposed fabrication methods can produce integrated optical elements of adequate parameters.
Czech name
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Czech description
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Classification
Type
D - Article in proceedings
CEP classification
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OECD FORD branch
10306 - Optics (including laser optics and quantum optics)
Result continuities
Project
<a href="/en/project/LM2015056" target="_blank" >LM2015056: Center of Accelerators and Nuclear Analytical Methods</a><br>
Continuities
I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace
Others
Publication year
2017
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Article name in the collection
International Conference on Transparent Optical Networks-ICTON
ISBN
978-1-5386-0859-3
ISSN
2162-7339
e-ISSN
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Number of pages
4
Pages from-to
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Publisher name
IEEE
Place of publication
New York
Event location
Girona
Event date
Jul 2, 2017
Type of event by nationality
WRD - Celosvětová akce
UT code for WoS article
000427031500146