Multiwavelength digital holography for polishing tool shape measurement

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F61389021%3A_____%2F13%3A00499540" target="_blank" >RIV/61389021:_____/13:00499540 - isvavai.cz</a>

Alternative codes found

RIV/46747885:24220/13:#0002853 RIV/61389021:_____/18:00499540

Result on the web

<a href="http://dx.doi.org/10.1117/12.2030004" target="_blank" >http://dx.doi.org/10.1117/12.2030004</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1117/12.2030004" target="_blank" >10.1117/12.2030004</a>

Result language

angličtina

Original language name

Multiwavelength digital holography for polishing tool shape measurement

Original language description

Classical mechano-chemical polishing is still a valuable technique, which gives unbeatable results for some types of optical surfaces. For example, optics for high power lasers requires minimized subsurface damage, very high cosmetic quality, and low mid spatial frequency error. One can hardly achieve this with use of subaperture polishing. The shape of the polishing tool plays a crucial role in achieving the required form of the optical surface. Often the shape of the polishing tool or pad is not known precisely enough during the manufacturing process. The tool shape is usually premachined and later is changed during the polishing procedure. An experienced worker could estimate the shape of the tool indirectly from the shape of the polished element, and that is why he can achieve the required shape in few reasonably long iterative steps. Therefore the lack of the exact tool shape knowledge is tolerated. Sometimes, this indirect method is not feasible even if small parts are considered. Moreover, if processes on machines like planetary (continuous) polishers are considered, the incorrect shape of the polishing pad could extend the polishing times extremely. Every iteration step takes hours. Even worse, polished piece could be wasted if the pad has a poor shape. The ability of the tool shape determination would be very valuable in those types of lengthy processes. It was our primary motivation to develop a contactless measurement method for large diffusive surfaces and demonstrate its usability. The proposed method is based on application of multiwavelength digital holographic interferometry with phase shift.

Czech name

—

Czech description

—

Type

D - Article in proceedings

CEP classification

—

OECD FORD branch

20201 - Electrical and electronic engineering

Project

<a href="/en/project/ED2.1.00%2F03.0079" target="_blank" >ED2.1.00/03.0079: Regional Center for Specialized Optical and Optoelektronic Systems</a><br>

Continuities

I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Publication year

2013

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Article name in the collection

Proceedings of SPIE

ISBN

978-081949747-5

ISSN

0277786X

e-ISSN

—

Number of pages

6

Pages from-to

88840E

Publisher name

SPIE-int. soc. optical engineering

Place of publication

Rochester

Event location

Rochester

Event date

Oct 14, 2013

Type of event by nationality

WRD - Celosvětová akce

UT code for WoS article

000327590200010