EUV radiation from nitrogen capillary discharge
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F61389021%3A_____%2F14%3A00431262" target="_blank" >RIV/61389021:_____/14:00431262 - isvavai.cz</a>
Result on the web
<a href="http://dx.doi.org/10.1142/S2010194514603299" target="_blank" >http://dx.doi.org/10.1142/S2010194514603299</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1142/S2010194514603299" target="_blank" >10.1142/S2010194514603299</a>
Alternative languages
Result language
angličtina
Original language name
EUV radiation from nitrogen capillary discharge
Original language description
In the last decade EUV sources attract interest from researchers over the world. One of the main motivations is EUV lithography, which could lead to further miniaturization in electronics. Nitrogen recombination laser at wavelength of 13.4 nm based on capillary discharge Z-pinch configuration could be used in experiments with testing of resolution of photoresist for EUV lithography (close to wavelength of 13.5 nm Si/Mo multilayer mirrors have a high reflectivity at normal incidence angles). In this work,pinching of nitrogen-filled capillary discharge is studied for the development of EUV laser,which is based on recombination pumping scheme.The goal of this study is achieving the required plasma conditions using a capillary discharge Z-pinch apparatus.In experiments with nitrogen,the capillary length was shortened from 232 mm to 90 mm and current quarter-period was changed from 60 ns to 50 ns in contrast with early experiments with Ne-like argon laser.EUV radiation from capillary
Czech name
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Czech description
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Classification
Type
D - Article in proceedings
CEP classification
BL - Plasma physics and discharge through gases
OECD FORD branch
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Result continuities
Project
<a href="/en/project/LG13029" target="_blank" >LG13029: Research in the Frame of the Internatinal Center for Dense Magnetized Plasmas</a><br>
Continuities
I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace
Others
Publication year
2014
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Article name in the collection
International Journal of Modern Physics: Conference Series
ISBN
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ISSN
2010-1945
e-ISSN
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Number of pages
7
Pages from-to
"1460329-1 "-"1460329-7"
Publisher name
World Scientific Publishing Co
Place of publication
Singapore
Event location
Singapore
Event date
Dec 4, 2013
Type of event by nationality
WRD - Celosvětová akce
UT code for WoS article
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