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EUV radiation from nitrogen capillary discharge

The result's identifiers

  • Result code in IS VaVaI

    <a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F61389021%3A_____%2F14%3A00431262" target="_blank" >RIV/61389021:_____/14:00431262 - isvavai.cz</a>

  • Result on the web

    <a href="http://dx.doi.org/10.1142/S2010194514603299" target="_blank" >http://dx.doi.org/10.1142/S2010194514603299</a>

  • DOI - Digital Object Identifier

    <a href="http://dx.doi.org/10.1142/S2010194514603299" target="_blank" >10.1142/S2010194514603299</a>

Alternative languages

  • Result language

    angličtina

  • Original language name

    EUV radiation from nitrogen capillary discharge

  • Original language description

    In the last decade EUV sources attract interest from researchers over the world. One of the main motivations is EUV lithography, which could lead to further miniaturization in electronics. Nitrogen recombination laser at wavelength of 13.4 nm based on capillary discharge Z-pinch configuration could be used in experiments with testing of resolution of photoresist for EUV lithography (close to wavelength of 13.5 nm Si/Mo multilayer mirrors have a high reflectivity at normal incidence angles). In this work,pinching of nitrogen-filled capillary discharge is studied for the development of EUV laser,which is based on recombination pumping scheme.The goal of this study is achieving the required plasma conditions using a capillary discharge Z-pinch apparatus.In experiments with nitrogen,the capillary length was shortened from 232 mm to 90 mm and current quarter-period was changed from 60 ns to 50 ns in contrast with early experiments with Ne-like argon laser.EUV radiation from capillary

  • Czech name

  • Czech description

Classification

  • Type

    D - Article in proceedings

  • CEP classification

    BL - Plasma physics and discharge through gases

  • OECD FORD branch

Result continuities

  • Project

    <a href="/en/project/LG13029" target="_blank" >LG13029: Research in the Frame of the Internatinal Center for Dense Magnetized Plasmas</a><br>

  • Continuities

    I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Others

  • Publication year

    2014

  • Confidentiality

    S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Data specific for result type

  • Article name in the collection

    International Journal of Modern Physics: Conference Series

  • ISBN

  • ISSN

    2010-1945

  • e-ISSN

  • Number of pages

    7

  • Pages from-to

    "1460329-1 "-"1460329-7"

  • Publisher name

    World Scientific Publishing Co

  • Place of publication

    Singapore

  • Event location

    Singapore

  • Event date

    Dec 4, 2013

  • Type of event by nationality

    WRD - Celosvětová akce

  • UT code for WoS article