An extreme ultraviolet interferometer suitable to generate dense interference pattern
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F61389021%3A_____%2F14%3A00436667" target="_blank" >RIV/61389021:_____/14:00436667 - isvavai.cz</a>
Result on the web
<a href="http://dx.doi.org/10.1117/12.2061858" target="_blank" >http://dx.doi.org/10.1117/12.2061858</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1117/12.2061858" target="_blank" >10.1117/12.2061858</a>
Alternative languages
Result language
angličtina
Original language name
An extreme ultraviolet interferometer suitable to generate dense interference pattern
Original language description
t has been designed a new type of interferometer working in extreme ultraviolet (XUV) region and intended for direct imprinting of densest possible (for given wavelength) interference pattern into a substrate. The interferometer belongs to the wave-frontdivision category: each of its two aspheric mirrors reflects approximately one half of incoming laser beam and focuses it into a point image. Both focused beams have to intersect each other, and in the intersection region an interference pattern is generated. The closer the intersection region is to the above-mentioned point images, the smaller the interference field is, but simultaneously the smaller the fringe-pitch is. This paper describes interferometer design (inclusive fringe-pitch calculation, and inclusive design of multilayer reflection coatings for the wavelength 46.9 nm (Ar8+ laser) -ensuring equal reflectivity at different reflection angles).The interferometer design is supplemented not only by ray-tracing verification
Czech name
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Czech description
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Classification
Type
D - Article in proceedings
CEP classification
BH - Optics, masers and lasers
OECD FORD branch
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Result continuities
Project
<a href="/en/project/LG13029" target="_blank" >LG13029: Research in the Frame of the Internatinal Center for Dense Magnetized Plasmas</a><br>
Continuities
I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace
Others
Publication year
2014
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Article name in the collection
Proceedings of SPIE 9206, Advances in Metrology for X-Ray and EUV Optics V
ISBN
978-1-62841-233-8
ISSN
0277-786X
e-ISSN
—
Number of pages
10
Pages from-to
"92060D"-"92060D"
Publisher name
SPIE
Place of publication
Bellingham
Event location
San Diego
Event date
Aug 19, 2014
Type of event by nationality
WRD - Celosvětová akce
UT code for WoS article
000343876300008