Super-polishing of Zerodur aspheres by means of conventional polishing technology
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F61389021%3A_____%2F15%3A00444558" target="_blank" >RIV/61389021:_____/15:00444558 - isvavai.cz</a>
Result on the web
<a href="http://dx.doi.org/10.1117/12.2175899" target="_blank" >http://dx.doi.org/10.1117/12.2175899</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1117/12.2175899" target="_blank" >10.1117/12.2175899</a>
Alternative languages
Result language
angličtina
Original language name
Super-polishing of Zerodur aspheres by means of conventional polishing technology
Original language description
This paper describes a quest to find simple technique to superpolish Zerodur asphere (55 mu m departure from best fit sphere) that could be employed on old fashion way 1-excenter optical polishing machine. The work focuses on selection of polishing technology, study of different polishing slurries and optimization of polishing setup. It is demonstrated that either by use of fine colloidal CeO2 slurry or by use of bowl-feed polishing setup with CeO2 charged pitch we could reach 0.4nm RMS roughness whileremoving <30nm of surface layer. This technique, although not optimized, was successfully used to improve surface roughness on already prepolished Zerodur aspheres without necessity to involve sophisticated super-polishing technology and highly trained manpower
Czech name
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Czech description
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Classification
Type
D - Article in proceedings
CEP classification
JP - Industrial processes and processing
OECD FORD branch
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Result continuities
Project
<a href="/en/project/LO1206" target="_blank" >LO1206: Modern optical systems and technologies</a><br>
Continuities
I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace
Others
Publication year
2015
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Article name in the collection
Proceedings of SPIE Vol. 9442: Optics and Measurement Conference 2014
ISBN
978-1-62841-557-5
ISSN
0277-786X
e-ISSN
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Number of pages
10
Pages from-to
944212-944212
Publisher name
SPIE-INT SOC OPTICAL ENGINEERING
Place of publication
Bellingham
Event location
Liberec
Event date
Oct 7, 2014
Type of event by nationality
WRD - Celosvětová akce
UT code for WoS article
000349403500037