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Super-polishing of Zerodur aspheres by means of conventional polishing technology

The result's identifiers

  • Result code in IS VaVaI

    <a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F61389021%3A_____%2F15%3A00444558" target="_blank" >RIV/61389021:_____/15:00444558 - isvavai.cz</a>

  • Result on the web

    <a href="http://dx.doi.org/10.1117/12.2175899" target="_blank" >http://dx.doi.org/10.1117/12.2175899</a>

  • DOI - Digital Object Identifier

    <a href="http://dx.doi.org/10.1117/12.2175899" target="_blank" >10.1117/12.2175899</a>

Alternative languages

  • Result language

    angličtina

  • Original language name

    Super-polishing of Zerodur aspheres by means of conventional polishing technology

  • Original language description

    This paper describes a quest to find simple technique to superpolish Zerodur asphere (55 mu m departure from best fit sphere) that could be employed on old fashion way 1-excenter optical polishing machine. The work focuses on selection of polishing technology, study of different polishing slurries and optimization of polishing setup. It is demonstrated that either by use of fine colloidal CeO2 slurry or by use of bowl-feed polishing setup with CeO2 charged pitch we could reach 0.4nm RMS roughness whileremoving <30nm of surface layer. This technique, although not optimized, was successfully used to improve surface roughness on already prepolished Zerodur aspheres without necessity to involve sophisticated super-polishing technology and highly trained manpower

  • Czech name

  • Czech description

Classification

  • Type

    D - Article in proceedings

  • CEP classification

    JP - Industrial processes and processing

  • OECD FORD branch

Result continuities

  • Project

    <a href="/en/project/LO1206" target="_blank" >LO1206: Modern optical systems and technologies</a><br>

  • Continuities

    I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Others

  • Publication year

    2015

  • Confidentiality

    S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Data specific for result type

  • Article name in the collection

    Proceedings of SPIE Vol. 9442: Optics and Measurement Conference 2014

  • ISBN

    978-1-62841-557-5

  • ISSN

    0277-786X

  • e-ISSN

  • Number of pages

    10

  • Pages from-to

    944212-944212

  • Publisher name

    SPIE-INT SOC OPTICAL ENGINEERING

  • Place of publication

    Bellingham

  • Event location

    Liberec

  • Event date

    Oct 7, 2014

  • Type of event by nationality

    WRD - Celosvětová akce

  • UT code for WoS article

    000349403500037