Quantitative low-energy ion beam characterization by beam profiling and imaging via scintillation screens.
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F61389021%3A_____%2F16%3A00469204" target="_blank" >RIV/61389021:_____/16:00469204 - isvavai.cz</a>
Result on the web
<a href="http://dx.doi.org/10.1063/1.4964701" target="_blank" >http://dx.doi.org/10.1063/1.4964701</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1063/1.4964701" target="_blank" >10.1063/1.4964701</a>
Alternative languages
Result language
angličtina
Original language name
Quantitative low-energy ion beam characterization by beam profiling and imaging via scintillation screens.
Original language description
This study presents the imaging and characterization of low-current ion beams in the neutralized state monitored via single crystal YAG:Ce (Y3Al5O12) scintillators. To validate the presented beam diagnostic tool, Faraday cup measurements and test etchings were performed. Argon ions with a typical energy of 1.0 keV were emitted from an inductively coupled radio-frequency (13.56 MHz) ion beam source with total currents of some mA. Different beam properties, such as, lateral ion current density, beam divergence angle, and current density in pulsed ion beams have been studied to obtain information about the spatial beam profile and the material removal rate distribution. We observed excellent imaging properties with the scintillation screen and achieved a detailed characterization of the neutralized ion beam. A strong correlation between the scintillator light output, the ion current density, and the material removal rate could be observed.
Czech name
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Czech description
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Classification
Type
J<sub>x</sub> - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)
CEP classification
JB - Sensors, detecting elements, measurement and regulation
OECD FORD branch
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Result continuities
Project
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Continuities
I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace
Others
Publication year
2016
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Review of Scientific Instruments
ISSN
0034-6748
e-ISSN
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Volume of the periodical
87
Issue of the periodical within the volume
11
Country of publishing house
US - UNITED STATES
Number of pages
15
Pages from-to
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UT code for WoS article
000390242300329
EID of the result in the Scopus database
2-s2.0-84994267529