Losses in TiO2/SiO2 Multilayer Coatings

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F61389021%3A_____%2F16%3A00469360" target="_blank" >RIV/61389021:_____/16:00469360 - isvavai.cz</a>
Result on the web
<a href="http://dx.doi.org/10.1117/12.2257232" target="_blank" >http://dx.doi.org/10.1117/12.2257232</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1117/12.2257232" target="_blank" >10.1117/12.2257232</a>

Result language
angličtina
Original language name
Losses in TiO2/SiO2 Multilayer Coatings
Original language description
This paper deals with optical losses in the coatings consisting of a combination of titanium dioxide (TiO2) and silicon dioxide (SiO2) layers evaporated by the ion beam assisted deposition (IBAD). This combination is commonly used for optical coatings as a standard choice for antireflective or any other optical filter in the visible and near IR range. Although the technology has been known for decades, we point out that some undescribed parasite losses can still appear and we show how to deal with them. In fact, in some cases, the losses made the target coating even inapplicable. In this paper we try to investigate the origin of the losses and we describe the deposition parameters which allow us to reduce or completely remove them. We determined whether the losses are proportional to the total thickness of the coating or to the number of layers. The influence of scattering was measured as well. Deposition parameters which were studied are the substrate temperature, discharge voltage of the assisting ion gun, oxygen flow of the assisting ion gun and the deposition rate, especially its starting curve. Influence of the post process annealing was studied as well. Starting curve of the deposition rate of SiO2 layer and the amount of oxygen flowing through the assisting ion gun were found as a crucial parameters.
Czech name
—
Czech description
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Project
<a href="/en/project/LO1206" target="_blank" >LO1206: Modern optical systems and technologies</a><br>
Continuities
I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Publication year
2016
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Article name in the collection
Proceedings of SPIE 10151, Optics and Measurement International Conference 2016
ISBN
978-1-5106-0753-8
ISSN
0277-786X
e-ISSN
—
Number of pages
7
Pages from-to
—
Publisher name
SPIE, Society of Photo-Optical Instrumentation Engineers
Place of publication
Bellingham
Event location
Liberec
Event date
Oct 11, 2016
Type of event by nationality
WRD - Celosvětová akce
UT code for WoS article
000393154700027

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