Material design problems of plasma-chemical reactors for disposal perfluorinated compounds

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F61389021%3A_____%2F17%3A00487169" target="_blank" >RIV/61389021:_____/17:00487169 - isvavai.cz</a>

Result on the web

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DOI - Digital Object Identifier

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Result language

angličtina

Original language name

Material design problems of plasma-chemical reactors for disposal perfluorinated compounds

Original language description

Reduction of perfluorinated gases emissions from semiconductor industry has recently introduced a serious problem from both technological and economic side. With respect to chemistry of the decomposition reactions the most effective abatement techniques developed up to now consists in the interaction of those gaseous pollutants with several types of plasmas. In the framework of Czech-Taiwanese bilateral project No. 17-10246J 'Decomposition of Perfluorinated Compounds and Fluorinated Ozone Depleting Substances' a new plasmochemical reactor design is to be solved. In this reactor the plasma abatement process consisting of interaction of the plasma generated by unique watter stabilized H-WSP plasma torch at temperatures rangingnfrom 2000 K up to 25,000 K with the treated gases will be carried out. However, the main product generated in the reactor during the steam plasma abatement process is hydrogen fluoride which causes corrosion of almost every construction material. The aim pursued by the work presented is to search for the materials resistant to exposition of HF even at high temperatures. To investigate corrosion resistance of construction materials with thermal stability within temperature interval 2700-3000 °C titan nitride, boron nitride, and silicon carbide have been selected. The samples of those materials have been prepared by spark plasma sintering method and exposed to concentrated solution of hydrofluoric acid for which corrosion rates have been measured

Czech name

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Czech description

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Type

D - Article in proceedings

CEP classification

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OECD FORD branch

10305 - Fluids and plasma physics (including surface physics)

Project

<a href="/en/project/GC17-10246J" target="_blank" >GC17-10246J: Decomposition of perfluorinated compounds and fluorinated ozone depleting substances in thermal plasma jets</a><br>

Continuities

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year

2017

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Article name in the collection

Proceedings of 5th International Conference on Chemical Technology

ISBN

978-80-86238-65-4

ISSN

2336-811X

e-ISSN

2336-8128

Number of pages

6

Pages from-to

267-272

Publisher name

Czech Society of Industrial Chemistry

Place of publication

Prague

Event location

Mikulov

Event date

Apr 10, 2017

Type of event by nationality

WRD - Celosvětová akce

UT code for WoS article

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